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首页> 外文会议>Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS >Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part VI — Corresponding relationship between sensitivity and magnetic induction
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Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part VI — Corresponding relationship between sensitivity and magnetic induction

机译：开发用于直流电源最终使用监控的MEMS直流电流传感器：第六部分-灵敏度和磁感应强度之间的对应关系

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A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in our past work (DTIP 2011). A MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was then micro-fabricated for preliminarily examination (DTIP 2012). A novel oscillating type MEMS DC current sensor, comprised of both actuating and sensing elements, was further proposed for two-wire DC electric appliances (DTIP2013). Then the ANSYS analytical model for the proposed cantilever-based device with integrating a micro-magnet was established and the frequency shifts due to the applied exterior magnetic field were preliminarily studied (DTIP2014). And a bending type MEMS-scale DC current sensor device with three parallel PZT partition plates, was fabricated for preliminary examination (DTIP2015). In present study, the relationship between magnetic induction and sensitivity of the proposed DC current sensor is discussed both analytically and experimentally. It can be found that the sensitivity increases with the increasing of the magnetic induction, approached by applying the different number of fixed magnets. And the effect of this approaching on the measurement accuracy will be discussed in the future.
机译：我们过去的工作（DTIP 2011）提出了一种无源（无功率）弯曲型MEMS DC电流传感器，以满足直流电源不断增长的需求，以监控单线或两线设备电源线的电力消耗。然后，对由5个平行PZT板组成的MEMS规模的原型DC传感器进行了微制造，以进行初步检查（DTIP 2012）。进一步提出了一种新颖的振荡型MEMS DC电流传感器，该器件由致动元件和感测元件组成，适用于两线制DC电器（DTIP2013）。然后，针对所提出的集成了微磁体的悬臂式设备，建立了ANSYS分析模型，并初步研究了由于施加的外部磁场引起的频率偏移（DTIP2014）。并制造了具有三个平行PZT隔板的弯曲型MEMS规模的直流电流传感器器件进行初步检查（DTIP2015）。在本研究中，在分析和实验上讨论了所提出的直流电流传感器的磁感应与灵敏度之间的关系。可以发现，灵敏度随着磁感应强度的增加而增加，这是通过应用不同数量的固定磁体来实现的。将来将讨论这种方法对测量精度的影响。

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