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SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography: Toward future mass production of photonic crystal nanocavity devices

机译：用光刻技术制备的SiO 2 包覆有源和无源光子晶体纳米腔器件：走向未来光子晶体纳米腔器件的批量生产

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We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

机译：我们描述了无源和有源光子晶体纳米腔器件的制造和演示，即电光调制器，全硅光电探测器和DeMUX滤波器。这是采用光刻工艺制造的有源和无源光子晶体纳米腔器件的首次演示，这可能会导致未来的批量生产。

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《Conference on Lasers and Electro-Optics Pacific Rim》|2017年|1-2|共2页
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Nurul Ashikin Binti Daud; Yuta Ooka; Tomohisa Tabata; Tomohiro Tetsumoto; Takasumi Tanabe;
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demultiplexing equipment; electro-optical modulation; integrated optics; nanolithography; nanophotonics; optical fabrication; optical filters; photodetectors; photolithography; photonic crystals; silicon;

机译：解复用设备;电光调制;集成光学;纳米光刻;纳米光子学;光学制造;光学滤波器;光电探测器;光刻;光子晶体;硅;
入库时间 2022-08-26 15:11:37

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专利

1. CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform [J] . Yuta Ooka, Tomohiro Tetsumoto, Akihiro Fushimi, Scientific reports. . 2015,第1期

机译：在硅光子平台上通过光刻法制造的CMOS兼容高Q光子晶体纳米腔
2. Electrically Driven Photonic Crystal Nanocavity Devices [J] . Shambat G., Ellis B., Petykiewicz J., Selected Topics in Quantum Electronics, IEEE Journal of . 2012,第6期

机译：电驱动光子晶体纳米腔设备
3. 2O nanocrystals/TiO 2 photonic crystal composite for efficient p-nitrophenol removal]]> [J] . Ying Lu, Yanyan Xu, Qiong Wu, Colloids and Surfaces, A. Physicochemical and Engineering Aspects . 2018,第期

机译：<！[CDATA [CU 2 O NANOCrystals / TIO 2 光子晶体复合材料高效 p - 硝基酚去除]]>
4. SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography: Toward future mass production of photonic crystal nanocavity devices [C] . Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Conference on Lasers and Electro-Optics Pacific Rim . 2017

机译：SiO 2 用光刻法制造的主动和被动光子晶体纳米腔装置：朝向未来的光子晶体纳米胶质装置生产
5. Planar photonic crystal nanocavities with active quantum nanostructures. [D] . Yoshie, Tomoyuki. 2004

机译：具有活性量子纳米结构的平面光子晶体纳米腔。
6. CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform [O] . Yuta Ooka, Tomohiro Tetsumoto, Akihiro Fushimi, -1

机译：在硅光子平台上通过光刻技术制造的CMOS兼容高Q光子晶体纳米腔
7. Photonic Crystals: Towards Nanoscale Photonic Devices Photonic Crystals: Towards Nanoscale Photonic Devices , Jean-Michel Lourtioz , Henri Benisty , Vincent Berger , Jean-Michel Gérard , Daniel Maystre , Alexis Tchelnokov (translated from French by Pierre-Noel Favennec), Springer, New York, 2005. $99.00 (426 pp.). ISBN 3-540-24431-X [O] . Eli Yablonovitch 2006

机译：光子晶体：朝向纳米级光子器件光子晶体：朝纳米级光子器件，Jean-Michel Lourtioz，Henri Benisty，Vincent Berger，Jean-MichelGérard，Zaniel Maystre，Alexis Tchelnokov（由Pierre-Noel Favennec翻译），Springer，New约克，2005年。$ 99.00（426 pp）。 ISBN 3-540-24431-x
8. Electrically Driven Photonic Crystal Nanocavity Devices. [R] . Shambat, G., Ellis, B., Petykiewicz, J., 2012

机译：电驱动光子晶体纳米腔器件。

SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography: Toward future mass production of photonic crystal nanocavity devices

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