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Understanding the intrinsic reliability behavior of $oldsymbol{n}$ -/$oldsymbol{p}$-Si and $oldsymbol{p}$-Ge nanowire FETs utilizing degradation maps

机译:了解 $ boldsymbol {n} $ -/ $ boldsymbol {p} $ -Si和 $ boldsymbol {p} $ < / tex> -Ge纳米线FET利用退化图

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We compare and model the main reliability limitations of stacked Gate-All-Around (GAA) n-/p-channel Silicon and strained p-channel Germanium Nanowire (NW) transistors. Stress measurements in the entire {VG, VD} space allow to separate the different degradation modes and how they interact with each other. We show that these degradation modes are not universal, as they have a different relative weight depending on the considered technology, and that they can show different acceleration mechanisms. Moreover, we also discuss the impact of self-heating effects (SHE) by means of activation energy extraction in the entire {VG, VD} map.
机译:我们比较并建模了堆叠全能门(GAA)n / p沟道硅和应变p沟道锗纳米线(NW)晶体管的主要可靠性限制。整个{V G ,V D }空间允许分隔不同的降级模式以及它们如何相互作用。我们证明了这些降级模式不是通用的,因为根据所考虑的技术它们具有不同的相对权重,并且它们可以显示不同的加速机制。此外,我们还讨论了在整个{V G ,V D } 地图。

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