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Spherical optical surface defects digitizing evaluation system

机译：球形光学表面缺陷数字化评估系统

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This paper introduces a spherical optical surface defects evaluation system (SSDES) based on the dark-field microscopic scattering imaging (DFMSI) method. The specially designed annular illuminant with variable aperture angles ensures the condition of DFMSI for spherical optical components with variable surface shapes and radii of curvature. On account of the small imaging field of view (FOV) of the SSDES relative to the large spherical optical component under test, the scanning path for subaperture images is planned along longitudes and latitudes of the spherical surface to detect the whole surface. Besides, for avoiding the misplaced subaperture images stitching due to the decenter error, a centering system is utilized to perform the alignment of the optical axis of the spherical optics in relation to the reference axis before capturing subaperture images. Then we propose a defect evaluation method, primarily involving the three-dimensional (3D) image reconstruction and global coordinate transformation, the projective stitching of 3D subaperture images, and the quantitative evaluation of defects, to process the captured spherical subaperture images. Experiments results are shown in good accordance with the OLYMPUS microscope for the relative error within 5%, and validate the SSDES to the micrometer resolution.
机译：本文介绍了一种基于暗场显微散射成像（DFMSI）方法的球形光学表面缺陷评估系统（SSDES）。特别设计的具有可变孔径角的环形光源确保了具有可变表面形状和曲率半径的球形光学组件的DFMSI条件。由于SSDES相对于受测的大型球形光学组件的成像视场（FOV）较小，因此沿球形表面的经度和纬度规划了子孔径图像的扫描路径，以检测整个表面。此外，为了避免由于偏心误差而导致错位的子孔径图像拼接，在捕获子孔径图像之前，利用定心系统来执行球面光学器件的光轴相对于基准轴的对准。然后，我们提出一种缺陷评估方法，主要处理三维（3D）图像重建和全局坐标变换，3D子孔径图像的投影拼接以及缺陷的定量评估，以处理捕获的球形子孔径图像。实验结果与OLYMPUS显微镜相吻合，相对误差在5％以内，并验证了SSDES的千分尺分辨率。

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