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ESD Challenges in Advanced FinFET and GAA Nanowire CMOS Technologies: Designing Diode Based ESD Protection in Advanced State of the Art Technologies

机译：先进FinFET和GAA纳米线CMOS技术中的ESD挑战：设计先进技术中基于二极管的ESD保护

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This article consists of a collection of 100 slides from the author's tutorial conference presentation. Some of the specific areas/topics discussed include: Technology Options Impacting ESD Diode Performance; ESD in the State-of-the-art FinFET Technology; New Process Options; Gated Diode vs. STI Diode; Proposed Solutions; Outlook on ESD Challenges in Future CMOS Technology Nodes; and Latchup (LU) Risk in Bulk FinFET Technology.

机译：本文由作者的教程会议演示文稿中的100张幻灯片组成。讨论的一些特定领域/主题包括：影响ESD二极管性能的技术选择;最新的FinFET技术中的ESD;新工艺选项;门控二极管与STI二极管拟议的解决方案;未来CMOS技术节点中的ESD挑战展望;以及Fin Fin技术中的闩锁（LU）风险。

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《IEEE Custom Integrated Circuits Conference》|2019年|1-100|共100页
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Shih-Hung Chen;
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关键词
Silicon; Electrostatic discharges; Logic gates; FinFETs; Gallium arsenide; Application specific integrated circuits; Education; Tutorials;

机译：硅;静电放电;逻辑门; FinFETs;砷化镓;专用集成电路;教育;教程;

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1. ESD issues in advanced CMOS bulk and FinFET technologies: Processing, protection devices and circuit strategies [J] . Christian Russ Microelectronics reliability . 2008,第8a9期

机译：先进的CMOS本体和FinFET技术中的ESD问题：处理，保护设备和电路策略
2. Simulation of ESD protection devices in an advanced CMOS technology using a TCAD workbench based on an ESD calibration methodology [J] . T. Cilento, M. Schenkel, C. Yun, Microelectronics & Reliability . 2010,第9a11期

机译：使用基于ESD校准方法的TCAD工作台以先进的CMOS技术对ESD保护器件进行仿真
3. An Enhanced MLSCR Structure Suitable for ESD Protection in Advanced Epitaxial CMOS Technology [J] . Du Feibo, Hou Fei, Song Wenqiang, IEEE Transactions on Electron Devices . 2019,第5期

机译：适用于高级外延CMOS技术中ESD保护的增强型MLSCR结构
4. ESD Challenges in Advanced FinFET and GAA Nanowire CMOS Technologies: Designing Diode Based ESD Protection in Advanced State of the Art Technologies [C] . Shih-Hung Chen IEEE Custom Integrated Circuits Conference . 2019

机译：高级FinFET和GAA纳米线CMOS技术中的ESD挑战：在艺术技术的先进状态下设计基于DIODE的ESD保护
5. ESD protection circuits for advanced CMOS technologies. [D] . Chun, Jung-Hoon. 2006

机译：用于先进CMOS技术的ESD保护电路。
6. Dynamic pH Sensor with Embedded Calibration Scheme by Advanced CMOS FinFET Technology [O] . Chien-Ping Wang, Ying-Chun Shen, Peng-Chun Liou, 2019

机译：具有嵌入式校准方案的动态pH传感器采用先进的CMOS FinFET技术
7. Advanced ESD power clamp design for SOI FinFET CMOS technology [O] . Thijs, Steven, Trémouilles, David, Linten, Dimitri, 2010

机译：适用于SOI FinFET CMOS技术的高级ESD功率钳位设计

ESD Challenges in Advanced FinFET and GAA Nanowire CMOS Technologies: Designing Diode Based ESD Protection in Advanced State of the Art Technologies

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