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A 9-bit Resistor-Based All-Digital Temperature Sensor with a SAR-Quantization Embedded Differential Low-Pass Filter in 65nm CMOS Consuming 57pJ with a 2.5 μs Conversion Time

机译：基于9位电阻的全数字温度传感器，具有SAR量化嵌入式差分低通滤波器，采用65nm CMOS消耗57pJ，转换时间为2.5μs

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This paper presents a resistor-based area-compact temperature sensor for on-chip thermal detection. It has three novel features: (1) a differential low pass RC filter (DLPF) -based thermal sensing reduces the area; (2) the SAR-quantization embedded in the DLPF reuses the capacitor in the DLPF for capacitive-DAC, eliminates DAC reference, and utilizes the full input range of the ADC, and (3) an all-digital circuit architecture which can be easily migrated to different processes. The temperature sensor was fabricated in a 65nm CMOS technology and achieved 0.4 °C resolution at room temperature. After a 2-point calibration, the sensor achieves a 3σ inaccuracy of ±1.2 °C from -30 to 100 °C. It consumes 22.8 μW power from a 0.9V supply. With a 2.5 μs conversion time, the sensor achieves a 57 pJ/Conversion energy efficiency, which yields a 9 pJ·K² resolution FoM.

机译：本文提出了一种基于电阻的面积紧凑型温度传感器，用于片上热检测。它具有三个新颖的特征：（1）基于差分低通RC滤波器（DLPF）的热感测减小了面积; （2）嵌入DLPF的SAR量化将DLPF中的电容器重新用于电容式DAC，消除了DAC参考，并利用了ADC的整个输入范围，以及（3）可以轻松实现的全数字电路架构迁移到不同的流程。温度传感器采用65nm CMOS技术制造，在室温下达到0.4°C的分辨率。经过两点校准后，传感器在-30至100°C的温度范围内达到3σ±1.2°C的误差。它从0.9V电源消耗22.8μW的功率。转换时间为2.5μs，传感器的转换效率为57 pJ / K，产生9 pJ·K ^{2
分辨率FoM。}

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《IEEE Custom Integrated Circuits Conference》|2019年|1-4|共4页
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Aili Wang; Chixiao Chen; C. -J. Richard Shi;
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Temperature sensors; Clocks; Capacitors; Temperature measurement; Resistors; Capacitance;

机译：温度传感器;时钟;电容器;温度测量;电阻器;电容;

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外文文献

1. A 9-Bit Resistor-Based Highly Digital Temperature Sensor With a SAR-Quantization Embedded Differential Low-Pass Filter in 65-nm CMOS With a 2.5- [J] . Aili Wang, Chixiao Chen, Chang Liu, IEEE sensors journal . 2019,第17期

机译：基于9位电阻的高数字温度传感器，带有SAR量化嵌入式差分低通滤波器，采用65nm CMOS和2.5-
2. All-Digital Time-Domain CMOS Smart Temperature Sensor with On-Chip Linearity Enhancement [J] . Chen Chun-Chi, Chen Chao-Lieh, Lin Yi SIAM journal on applied dynamical systems . 2017,第2期

机译：全数字时域CMOS智能温度传感器，片上线性增强
3. All-Digital Time-Domain CMOS Smart Temperature Sensor with On-Chip Linearity Enhancement [J] . Chun-Chi Chen, Chao-Lieh Chen, Yi Lin Sensors . 2016,第2期

机译：具有片上线性度增强功能的全数字时域CMOS智能温度传感器
4. A 9-bit Resistor-Based All-Digital Temperature Sensor with a SAR-Quantization Embedded Differential Low-Pass Filter in 65nm CMOS Consuming 57pJ with a 2.5 μs Conversion Time [C] . Aili Wang, Chixiao Chen, C. -J. Richard Shi IEEE Custom Integrated Circuits Conference . 2019

机译：基于9位电阻的全数字温度传感器，SAR量化嵌入式差动低通滤波器，在65nm CMOS中消耗57pj，具有2.5μs转换时间
5. Design, Fabrication and Characterization of CMOS-MEMS Novel Resonator with Embedded Heater for Filter, and Temperature Sensor Applications. [D] . Goktas, Hasan. 2015

机译：具有用于滤波器和温度传感器应用的嵌入式加热器的CMOS-MEMS新型谐振器的设计，制造和表征。
6. All-Digital Time-Domain CMOS Smart Temperature Sensor with On-Chip Linearity Enhancement [O] . Chun-Chi Chen, Chao-Lieh Chen, Yi Lin 2016

机译：具有片上线性度增强功能的全数字时域CMOS智能温度传感器
7. An All-Digital Reconfigurable Time-Domain ADC for Low-Voltage Sensor Interface in 65nm CMOS Technology [O] . Yu HOU, Takamoto WATANABE, Masaya MIYAHARA, 2015

机译：65nm CMOS技术中的低压传感器接口的全数字可重构时域ADC

A 9-bit Resistor-Based All-Digital Temperature Sensor with a SAR-Quantization Embedded Differential Low-Pass Filter in 65nm CMOS Consuming 57pJ with a 2.5 μs Conversion Time

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