ROBUST CONTROLLER DESIGN TO ACHIEVE ACTIVE DAMPING FOR A MEMS MICROPHONE

机译：坚固的控制器设计，实现MEMS麦克风的主动阻尼

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This paper presented an H{sub}∞-controller design to achieve active damping for a MEMS microphone system. The parametric uncertainties introduced by linearization process were modeled. The stability and performance of the closed-loop system were analyzed for the uncertain microphone model and both were shown to be robust. The nonlinear simulation further verifies that the controller offers the desired performance.

机译：本文介绍了H {Sub}∞控制器设计，以实现MEMS麦克风系统的主动阻尼。通过线性化过程引入的参数不确定性进行了建模。分析了闭环系统的稳定性和性能，针对不确定的麦克风模型分析，两者都被证明是坚固的。非线性模拟进一步验证控制器提供所需的性能。

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《ASME Dynamic Systems and Control Conference》|2008年||共8页
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Jinli Qu; Ronald N. Miles; N. Eva Wu;
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中图分类 T-53;
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4. ROBUST CONTROLLER DESIGN TO ACHIEVE ACTIVE DAMPING FOR A MEMS MICROPHONE [C] . ASME international mechanical engineering congress and exposition . 2009

机译：坚固的控制器设计，实现MEMS麦克风的主动阻尼
5. Robustness considerations in the controller implementation for a class of MEMS microphones: A simulation study. [D] . Steinmann, Andrew F. 2011

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6. Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications [O] . Néstor N. Peña-García, Luz A. Aguilera-Cortés, Max A. González-Palacios, 2018

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ROBUST CONTROLLER DESIGN TO ACHIEVE ACTIVE DAMPING FOR A MEMS MICROPHONE

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