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首页> 外文会议>Symposium on Design, Test, Integration Packaging of MEMS and MOEMS >Long-range Planar Conveyance Device Based On A Digital Electromagnetic Actuator Array
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Long-range Planar Conveyance Device Based On A Digital Electromagnetic Actuator Array

机译：基于数字电磁作动器阵列的远程平面输送装置

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摘要

Smart surfaces for micro-conveyance are planar motion devices that transport objects between specific positions. The solutions in this research topic have mainly used analog/continuous actuators with distributed sensors and feedback control schemes to accomplish high precision. Examples of these analog actuators are pneumatic (non-contact) and electrostatic (contact) conveyance systems, but their drawbacks are: complex modeling, control and air feeding logistics for the pneumatic solutions; and pull-in failures and high voltages for the electrostatic solutions. As an alternative, digital electromagnetic actuators offer sensor-less operation, simple control schemes and high precision but require precisely fabricated designs. In this article, we analyze the long-range capability of a digital electromagnetic actuator array prototype. We present the array’s operation principle and electromagnetic model, from which we derive the positives of expanding its active area. We perform experimental tests to demonstrate the long-range capability of the prototype and, based on the model and experimental results, we present and fabricate a modular and scalable design of the array for large active area applications.
机译：用于微传输的智能表面是在特定位置之间传输对象的平面运动设备。本研究主题中的解决方案主要使用具有分布式传感器的模拟/连续执行器和反馈控制方案来实现高精度。这些模拟执行器的例子是气动（非接触式）和静电（接触式）输送系统，但是它们的缺点是：气动解决方案的复杂建模，控制和空气供给物流;以及静电解决方案的引入故障和高压。作为替代方案，数字电磁执行器可提供无传感器操作，简单的控制方案和高精度，但需要精确设计的设计。在本文中，我们分析了数字电磁执行器阵列原型的远程能力。我们介绍了阵列的工作原理和电磁模型，从中我们可以得出扩大其有效面积的积极信息。我们进行实验测试以证明原型的远程能力，并基于模型和实验结果，为大型有源区域应用提出并制造阵列的模块化和可扩展设计。

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