Buried heterostructure surface emitting laser diodes fabricated using integrated vacuum processing

机译：掩埋异质结构表面发射使用集成真空处理制造的激光二极管

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In this paper, we describe an in-situ process in which etching and regrowth are performed in controlled vacuum environments without exposing samples to air. The etching includes electron cyclotron resonance (ECR) plasma H/sub 2/ to remove the native oxides, ECR SiCl/sub 4/ to etch anisotropically, and/or a brief Cl/sub 2/ chemical etch to remove any near surface damage. Solid-source molecular beam epitaxy (MBE) is used for regrowth. We have applied this in-situ all vacuum processing to the fabrication of buried heterostructure vertical cavity surface emitting laser diodes.

机译：在本文中，我们描述了一种原位过程，其中在受控真空环境中进行蚀刻和再生，而不将样品暴露在空气中。蚀刻包括电子回旋谐振（ECR）等离子体H / SUP 2 /以除去天然氧化物，ECR SICL / SUB 4 /以蚀刻各向异性，和/或简要的CL / SUB 2 /化学蚀刻以除去任何接近表面损坏。固体源分子束外延（MBE）用于再生。我们已经将这种原位的所有真空处理应用于掩埋异质结构垂直腔表面发射激光二极管的制造。

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《IEEE Lasers and Electro-Optics Society Annual Meeting》|1993年||共2页
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Hong M.; Vakhshoori D.; Institute of Electric and Electronic Engineer;
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中图分类自动化技术、计算机技术;
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专利

1. Vertical-cavity surface-emitting lasers fabricated by vacuum integrated processing [J] . Choquette K.D., Hasnain G. IEEE Photonics Technology Letters . 1992,第9期

机译：通过真空集成工艺制造的垂直腔面发射激光器
2. 1.55-/spl mu/m spot-size converter integrated laser diode with conventional buried-heterostructure laser process [J] . Sang-Wan Ryu, Sung-Bock Kim, Jae-Sik Sim, IEEE Photonics Technology Letters . 2003,第1期

机译：1.55- / spl微米/米点尺寸转换器集成激光二极管，采用传统的埋入异质结构激光工艺
3. Surface-emitting laser diode with distributed Bragg reflector and buried heterostructure [J] . Ogura M., Mukai S. Electronics Letters . 1990,第1期

机译：具有分布式布拉格反射器和掩埋异质结构的表面发射激光二极管
4. Buried heterostructure surface emitting laser diodes fabricated using integrated vacuum processing [C] . Hong, M., Vakhshoori, . 1993

机译：使用集成真空工艺制造的埋入异质结构表面发射激光二极管
5. Modeling and measurement of the differential resistance and ideality factors in heterostructure light emitting diodes and laser diodes. [D] . Li, Xiangming. 2008

机译：异质结构发光二极管和激光二极管中的差分电阻和理想因子的建模和测量。
6. Chemical analysis on laser processed Ultrahydrophobic Ti-6Al-4V surface by high vacuum Process [O] . R. Jagdheesh, M. Diaz, S. Marimuthu, 2019

机译：高真空法激光加工超疏水Ti-6Al-4V表面化学分析
7. Buried heterostructure vertical-cavity surface-emitting laser with semiconductor mirrors [O] . Zhao, G., Zhang, Y., Deppe, D. G., 2012

机译：埋地异质结构垂直腔面发射激光器半导体镜
8. GaInAsP/InP Buried-Heterostructure Surface-Emitting Diode Laser with MonolithicIntegrated Bifocal Microlens [R] . Liau, Z. L., Walpole, J. N., Missaggia, L. J., 1990

机译：具有单片集成双焦微透镜的GaInasp / Inp埋 - 异质结构表面发射二极管激光器

Buried heterostructure surface emitting laser diodes fabricated using integrated vacuum processing

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