Modeling gas damping and spring phenomena in MEMS with frequency-dependent macro-models

机译：用频率依赖宏观模型建模气体阻尼和春季现象

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In this paper, we present an efficient macromodel extraction technique for gas damping and spring effects for arbitrarily shaped MEMS devices. The technique applies an Arnoldi-based model-order-reduction algorithm to automatically generate low-order models in a matter of minutes from an FEM approximation of the linearized Reynolds equation. The low-order gas-damping model can be easily inserted into a system-level modeling package for transient and frequency analysis.

机译：在本文中，我们提出了一种用于对任意形状的MEMS器件的气体阻尼和弹簧效果的有效宏偶据提取技术。该技术应用基于Arnoldi的模型顺序减少算法，以在线性化雷诺方程的FEM近似的几分钟内自动生成低位模型。低阶气体阻尼模型可以很容易地插入系统级建模包中以进行瞬态和频率分析。

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《MIT Conference on Computational Fluid and Solid Mechanics》|2001年||共4页
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Yao-Joe Yang; Mattan Kamon; Vladimir L. Rabinovich; Chahid Ghaddar; Manish Deshpande; Ken Greiner; John R. Gilbert;
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中图分类 O35-53;
关键词
MEMS; Model order reduction; Gas damping;

机译：MEMS;模型顺序减少;气体阻尼;

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专利

1. SLIDE FILM DAMPING AND SQUEEZE FILM DAMPING MODELS CONSIDERING GAS RAREFACTION EFFECTS FOR MEMS DEVICES [J] . ANDOJO ONGKODJOJO, FRANCIS E. H. TAY International Journal of Computational Engineering Science(IJCES) . 2003,第2期

机译：考虑MEMS设备的气体反射效应的滑动膜阻尼和挤压膜阻尼模型
2. FORWARD MODELING OF PROPAGATING SLOW WAVES IN CORONAL LOOPS AND THEIR FREQUENCY-DEPENDENT DAMPING [J] . Sudip Mandal, Norbert Magyar, Ding Yuan, The Astrophysical journal . 2016,第1期

机译：在冠状环中传播慢波的正向建模及其与频率有关的阻尼
3. FORWARD MODELING OF PROPAGATING SLOW WAVES IN CORONAL LOOPS AND THEIR FREQUENCY-DEPENDENT DAMPING [J] . Sudip Mandal, Norbert Magyar, Ding Yuan, The Astrophysical journal . 2016,第1期

机译：在冠状环中传播慢波的正向建模及其与频率有关的阻尼
4. Modeling gas damping and spring phenomena in MEMS with frequency-dependent macro-models [C] . Yao-Joe Yang, Mattan Kamon, Vladimir L. Rabinovich, MIT Conference on Computational Fluid and Solid Mechanics Vol.2 Jun 12-15, 2001 . 2001

机译：使用频率相关的宏模型对MEMS中的气体阻尼和弹簧现象进行建模
5. Energy dissipations in MEMS resonators: Fluid damping of flexural resonators and thermoelastic damping. [D] . Zhang, Weibin. 2006

机译：MEMS谐振器中的能量耗散：挠曲谐振器的流体阻尼和热弹性阻尼。
6. Viscous damping and spring force calculation of regularly perforated MEMS microstructures in the Stokes approximation [O] . Dorel Homentcovschi, Bruce T. Murray, Ronald N. Miles -1

机译：以Stokes近似法计算规则穿孔的MEMS微结构的粘滞阻尼和弹力计算
7. A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor [O] . Shu-Jung Chen, Yung-Chuan Wu 2020

机译：CMOS-MEMS真空传感器的气流和参数提取新的宏观模型
8. Finite element modeling of truss structures with frequency-dependent material damping [R] . Lesieutre, George A. 1991

机译：具有频率相关材料阻尼的桁架结构有限元建模

Modeling gas damping and spring phenomena in MEMS with frequency-dependent macro-models

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