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首页> 外文会议>International Vacuum Web Coating Conference >Sputtering anti-reflective layers with the new MULTIWEB machine concept using computer aided recalculation
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Sputtering anti-reflective layers with the new MULTIWEB machine concept using computer aided recalculation

机译：采用计算机辅助重新计算的新多维机器概念溅射防反射层

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摘要

The development of a new machine generation emphasizes flexibility, productivity, cost of ownership and quality. This new modular concept for sputtering anti-reflective (AR) and other optical layer stacks on web includes deposition of ITO and SiO{sub}2, TiO{sub}2 multilayers for AR as well as a variety of other coatings. The four and six layer systems (web/Adhesion Layer/TiO{sub}2/SiO{sub}2/TiO{sub}2/SiO{sub}2/Air) and (web/Adhesion Layer/TiO{sub}2/SiO{sub}2/TiO{sub}2/SiO{sub}2/TiO{sub}2/SiO{sub}2/Air) can be deposited onto various substrate materials (PET, TAC, PC). An optical inline measurement method provides the operator information about the actual layer thickness inside each produced layer stack. With this information it is much easier for the operator to keep the product within specified tolerances and to make corrections if individual layers or any combination of layers run out of specification. Additionally this method reduces the time for switching from one recipe to another and reduces the time required to install new optical deposition processes in production.
机译：新机器的发展强调了灵活性，生产力，所有权和质量的成本。这种用于溅射抗反射（AR）和其他光学层堆叠的新的模块化概念包括ITO和SIO {SUB} 2，TIO {SUB} 2用于AR的多层，以及各种其他涂层。四个和六层系统（腹板/粘附层/ TiO {Sub} 2 / SiO {sub} 2 / TiO {sub} 2 / siO {sub} 2 / air）和（网/粘附层/ TiO {sub} 2 / SIO {SUB} 2 / TIO {SUB} 2 / SIO {SUB} 2 / TIO {SUB} 2 / SIO {SUB} 2 /空气可以沉积在各种衬底材料（PET，TAC，PC）上。光学内联测量方法提供关于每个产生的层堆叠内部实际层厚度的操作员信息。有了这些信息，操作员可以更容易地将产品保存在特定公差中，并在各个层或各层的任何组合中进行校正，以便耗尽规格。此外，该方法减少了从一个配方切换到另一个方法的时间，并减少了在生产中安装新的光学沉积过程所需的时间。

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