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Simple approaches to quantifying mechanical behavior of metallized coatings

机译:量化金属化涂层机械行为的简单方法

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The last decade has seen a huge number of specimen test types being evaluated for use in determining the modulus, strength, hardness, creep, and adhesion characteristics of thin metal films. While mostly directed toward the microelectronics industry these have more recently been employed for applications in magnetic recording, photographic film, automotive refinishing, MEMS, architectural panels, and flat panel displays. A host of lithographic test specimens for evaluating small volume properties has evolved. Still, the simplest techniques are those applicable to continuous films or coatings -- the indentation and scratch techniques. At the micro- and nanoscopic level, a few of these will be reviewed with quantitative data to demonstrate the quality of results. It will be shown that both sides of a polymer/metal interface as well as the interfacial adhesion itself can potentially be evaluated with nanoindentation techniques.
机译:过去十年来看,评估了大量的标本测试类型,用于确定薄金属膜的模量,强度,硬度,蠕变和粘附特性。虽然大多数针对微电子工业,但最近已经用于磁记录,摄影胶片,汽车修补,MEMS,建筑面板和平板显示器中的应用。用于评估小体积特性的一系列光刻试样已经进化。尽管如此,最简单的技术是适用于连续薄膜或涂层的那些 - 压痕和划痕技术。在微型和纳米镜水平上,将通过定量数据进行审查其中一些,以证明结果的质量。将表明,可以用纳米趋势技术评估聚合物/金属界面的两侧以及界面粘附本身。

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