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首页> 外文会议>International Congress on Applications of Lasers and Electro-Optics >PROCESSING OF DIELECTRIC MATERIALS AND METALS WITH PS LASERPULSES
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PROCESSING OF DIELECTRIC MATERIALS AND METALS WITH PS LASERPULSES

机译：用PS LaserPumss加工介电材料和金属

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Ever since industrially applicable ps laser systems have been available, cold ablation with ultra short laser pulses is of huge interest when high requirements concerning accuracy, defined surface roughness and small heat affected zone are demanded. Interesting applications are in the fields of surface and 3-d structuring with direct and induced processes. For a profitable industrial use of this technology high process efficiency is required, which is enabled by the development of systems with high average power of more than 100 W. The process efficiency directly scales with the average power when the repetition rate of the system is properly chosen. But aside from process efficiency often a high surface quality (low surface roughness, minimized surface melting and no oxidation processes) is desired. These measures are not only strongly affected by the laser parameters but also by the strategy of structuring. Especially for surface structuring the corresponding requirements for the equipment of the beam guiding system are often not accomplishable and therefore there is a strong demand for new technologies which have to be developed.
机译：从工业上适用的PS激光系统已经获得，由于需要高要求，所需的精度，定义的表面粗糙度和小型热影响区域的高要求，因此具有超短脉冲的冷消融具有巨大的兴趣。有趣的应用程序处于表面和3-D领域，具有直接和诱导的过程。为了实现这一技术的盈利工业用途，需要高流程效率，这是通过高于100 W平均功率的系统的开发实现的。当系统重复率正确时，工艺效率直接缩放平均功率选择。但除了过程效率之外，需要高表面质量（低表面粗糙度，最小化表面熔化和无氧化过程）。这些措施不仅受激光参数的强烈影响，而且是由结构的策略影响。特别是对于表面结构，梁引导系统的设备的相应要求通常不是实现的，因此对必须开发的新技术存在强烈需求。

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