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Visual Probe Mark Inspection, Using Hardware Implementation of Artificial Neural Networks, In VLSI Production

机译:视觉探测标记检测,使用人工神经网络的硬件实现,在VLSI生产中

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As a result of their adaptability, artificial neural networks present good solutions for a permanently increasing range of industrials problems. So, if their usefulness has already been confirmed, very few papers deal with real applications of this kind of technology. Our goal is to present a neural based solution that we have developed for visual inspection in VLSI production for the IBM Essonnes plant. The main characteristics of such systems are real-time control and high reliability in detection and classification tasks. The presented system is based on a ZISC, and IBM hardware implementation of the Restricted Coulomb Energy algorithm and of the K-Nearest Neighbor algorithm. The goal of the developed application is to inspect vias for probe damage during wafer tests: each via is analyzed and classified (good impact, bad impact or absence of impact). First results are really encouraging and show the efficiency of this system in manufacturing environment.
机译:由于其适应性,人工神经网络为永久增加的工业问题提供了良好的解决方案。因此,如果他们的有用性已经确认,很少有论文处理这种技术的真正应用。我们的目标是展示一个神经基础的解决方案,我们为IBM essonnes植物的VLSI生产中开发了目视检查。这些系统的主要特征是检测和分类任务的实时控制和高可靠性。呈现的系统基于ZISC和IBM硬件实现的受限库仑能量算法和K最近邻算法。开发应用的目标是在晶圆试验期间检查探针损坏的透视:分析和分析每个通孔(良好的影响,影响或影响不良或影响)。第一个结果非常令人鼓舞,并展示了该系统在制造环境中的效率。

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