首页> 外文会议>International Conference on Phenomena in Ionized Gases >Electron temperature in surfatron-generated plasma-jet in argon measured by double Langmuir probe
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Electron temperature in surfatron-generated plasma-jet in argon measured by double Langmuir probe

机译:通过双Langmuir探针测量的氩气中的电气温度在氩气中产生的氩气

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The diagnosed microwave plasma source consists of a surfatron powered by a microwave magnetron generator, which creates plasma from the flowing argon gas (at flow rate typically 600 sccm) in a quartz nozzle. We present first results of probe diagnostic of generated plasma at nozzle exit. The presented diagnostic includes the single and double probe measurements of the radial profile of the plasma-jet and its dependence on the axial position from the nozzle exit at argon pressure 4 kPa and microwave power 17 watts. In the future we plan to use the developed plasma source for material surface processing and possibly also in the area of biology and medicine.
机译:诊断出的微波等离子体源包括由微波磁控变成器提供动力的冲浪,其在石英喷嘴中从流动的氩气(通常为600 sccm处)产生等离子体。我们在喷嘴出口处展示了产生的等离子体探测器诊断结果。所提出的诊断包括等离子射流的径向轮廓的单个和双探针测量和其对来自氩气压4kPa和微波功率17瓦的喷嘴出口的轴向位置的依赖性。在未来,我们计划在生物学和医学领域中使用开发的等离子体源进行材料表面处理,也可能在地区。

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