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首页> 外文会议>International Conference on Advanced Ceramics and Composites >INFLUENCE OF THE STRUCTURE AND ELEMENTAL COMPOSITION ON THE PHYSICAL AND MECHANICAL PROPERTIES OF (TiZrHfVNb)N NANOSTRUCTURED COATINGS
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INFLUENCE OF THE STRUCTURE AND ELEMENTAL COMPOSITION ON THE PHYSICAL AND MECHANICAL PROPERTIES OF (TiZrHfVNb)N NANOSTRUCTURED COATINGS

机译：结构与元素组成对（TizrhFVNB）N纳米结构涂层物理和力学性能的影响

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摘要

In the presented study nitride high-entropy alloys (TiZrHfVNb)N, fabricated by the cathode vacuum-arc evaporation, were investigated using different complementary methods. Scanning electron microscopy with energy-dispersive analysis (SEM with EDS) and proton microbeam (μ-PIXE) were used to perform elemental structural analysis; X-ray diffraction analysis with "α-sin~2Ψ" measurements of a stress-strain state was used for investigation of phase composition and structure. Microhardness and tribological tests were used to perform mechanical and tribological analysis of nitride high-entropy alloys. It was found, that investigated coatings have single-phase state with fcc-lattice. Also, (TiZrHfVNb)N coatings demonstrate high hardness (up to 44.34 GPa) and good wear resistance. The influence of deposition parameters (substrate voltage bias and working gas pressure) on elemental distribution, phase structure, hardness and Young modulus, and the influence of thermal annealing on the phase structure were shown.
机译：在所提出的研究中，采用不同的互补方法研究由阴极真空弧蒸发制造的氮化物高熵合金（Tizrhfvnb）n。扫描电子显微镜与能量分散分析（SEM用EDS）和质子微观（μ-PIME）进行元素结构分析; X射线衍射分析与“α-SIN〜2ψ”测量应力 - 应变状态的测量用于研究相组成和结构。微硬度和摩擦学试验用于对氮化物高熵合金进行机械和摩擦学分析。发现，所研究的涂层具有单相状态，具有FCC-晶格。此外，（Tizrhfvnb）N涂层表现出高硬度（高达44.34GPa）和良好的耐磨性。沉积参数（衬底电压偏压和工作气体压力）对元素分布，相结构，硬度和幼模的影响，以及热退火对相结构的影响。

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