Microstructural analysis of Nb-doped anatase TiO2 transparent conductive films by transmission electron microscopy

机译：通过透射电子显微镜进行Nb掺杂锐钛矿TiO2透明导电膜的微观结构分析

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We investigated microstructures and transport properties of Nb-doped anatase TiO2 (TNO) films deposited by two methods: sputtering and pulsed laser deposition (PLD).We found that working pressure (Pw) of sputtering has a significant influence on both microstructures and transport properties. Cross-sectional observation by transmission electron microscopy revealed that lowered Pw improved homogeneity in the microstructure. This finding indicates that the inhomogeneous microstructure of the sputtered TNO films is not due to sputtering damage but to fluctuation in mass density. A sputtered film deposited at Pw = 0.50 Pa exhibited homogeneous microstructure and high Hall mobility comparable to those of PLD films.

机译：我们研究了两种方法沉积的Nb掺杂锐钛矿TiO2（TNO）膜的微观结构和运输性能：溅射和脉冲激光沉积（PLD）。我们发现溅射的工作压力（PW）对微观结构和运输性能有显着影响。透射电子显微镜的横截面观察显示，降低PW改善了微观结构的均匀性。该发现表明，溅射的TNO膜的不均匀微观结构不是由于溅射损坏，而是在质量密度的波动。沉积在PW = 0.50Pa的溅射膜表现出与PLD薄膜相当的均匀微观结构和高霍尔迁移率。

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《International Conference on Indium Phosphide Related Materials》|2016年|1 v.|共1页
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Daisuke Ogawa; Shoichiro Nakao; Kazuo Morikawa; Yasushi Hirose; Tetsuya Hasegawa;
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中图分类半导体技术;
关键词
Microstructure; Sputtering; Compounds; Films; Transmission electron microscopy; Chemistry;

机译：微观结构;溅射;化合物;薄膜;透射电子显微镜;化学;

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1. Effect of micromorphology on transport properties of Nb-doped anatase TiO_2 films: A transmission electron microscopy study [J] . Daisuke Ogawa, Shoichiro Nakao, Kazuo Morikawa, Physica status solidi . 2017,第3期

机译：微观形貌对Nb掺杂锐钛矿型TiO_2薄膜传输性能的影响：透射电镜研究
2. Large electron mass anisotropy in a d-electron-based transparent conducting oxide: Nb-doped anatase TiO_2 epitaxial films [J] . Yasushi Hirose, Naoomi Yamada, Shoichiro Nakao, Physical review . 2009,第16期

机译：d电子基透明导电氧化物中的大电子质量各向异性：Nb掺杂的锐钛矿型TiO_2外延膜
3. Transparent conductive Nb-doped TiO2 films deposited by RF magnetron co-sputtering [J] . Wan Guangmiao, Wang Shenwei, Zhang Xinwu, Applied Surface Science . 2015,第DECa1PTaA期

机译：射频磁控共溅射沉积透明掺杂Nb的TiO2导电薄膜
4. Microstructural analysis of Nb-doped anatase TiO2 transparent conductive films by transmission electron microscopy [C] . Daisuke Ogawa, Shoichiro Nakao, Kazuo Morikawa, 2016 Compound Semiconductor Week Includes 28th International Conference on Indium Phosphide amp; Related Materials amp; 43rd International Symposium on Compound Semiconductors . 2016

机译：透射电子显微镜分析Nb掺杂的锐钛矿型TiO2透明导电膜的微观结构
5. Analysis of the gallium nitride-sapphire thick films, processed by iodine vapor phase growth by transmission electron microscopy and atomic force microscopy. [D] . Bhaskara, Praveena Murthy. 2001

机译：用透射电子显微镜和原子力显微镜分析碘汽相生长处理的氮化镓-蓝宝石厚膜。
6. Wetting Properties of Transparent Anatase/Rutile Mixed Phase Glancing Angle Magnetron Sputtered Nano-TiO2 Films [O] . Vasiliki Vrakatseli, Ergina Farsari, Dimitrios Mataras 2020

机译：透明锐钛矿/金红石混合相掠角磁控溅射纳米TiO2薄膜的润湿特性
7. Seed-Mediated Growth of Conductive and Transparent Anatase Nb-TiO2 Films for CdS-Based Devices [O] . -1

机译：种子介导的CDS基装置的导电透明锐钛矿Nb-TiO2膜的生长
8. Microstructural Studies of Thick Film Resistors Using Transmission Electron Microscopy [R] . Nordstrom, T. V., Hills, C. R. 1979

机译：用透射电子显微镜研究厚膜电阻器的微观结构

Microstructural analysis of Nb-doped anatase TiO2 transparent conductive films by transmission electron microscopy

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