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Design and control of long travel range electromagnetically actuated positioning stage with application to precise machining

机译：长行程范围电磁致动定位级的设计与控制，用来精确加工

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This paper proposes a long travel range electromagnetically actuated positioning stage with application to micro machining. Specially, a probe with titanium coating is integrated with an electromagnetically actuated and damped positioning stage to perform millimeter range movement. Here, the developed stage replaces traditional piezoelectric actuators for the purpose of lengthening the motion range while minimizing the complexity of the electrical system. Besides that, a laser interferometer is installed and high precision metrology is implemented to improve precision of machining. Next, a robust adaptive sliding-mode controller is proposed to enhance system robustness and to reject environmental disturbance. The controller architecture consists of two major components: 1) sliding mode controller, and 2) robust adaptive law. With the proposed controller, the high precision machining, with the horizontal positioning error (in root-mean-square level) kept within 52nm, can be successfully achieved.
机译：本文提出了一种长的行驶范围电磁致动定位级，其应用于微加工。特别地，具有钛涂层的探针与电磁致动的和阻尼定位台集成，以执行毫米范围运动。这里，开发阶段取代传统的压电致动器，以便在最小化电气系统的复杂性的同时延长运动范围。除此之外，安装了激光干涉仪，实现了高精度计量，以提高加工精度。接下来，提出了一种强大的自适应滑模控制器，以增强系统鲁棒性并拒绝环境干扰。控制器架构由两个主要组件组成：1）滑模控制器和2）强大的自适应法。利用所提出的控制器，可以成功地实现高精度加工，具有在52nm内保持在52nm的水平定位误差（在根均方水平）中。

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