In order to achieve the uniform picosecond laser micro-machining effect, this study carries out the research of shaping theoriginal incident Gaussian beam into a micron-level flat-top beam at the focal position. Based on the principle of diffractiveoptics, the phase distribution of the shaping element is calculated which meets the micron-level flat-top beam outputrequirements and the verification of the shaping effect after transforming through the phase distribution is simulated. Whenthe simulated output beam distribution meets the design requirements, the shaping elements is manufactured. Finally, theshaping element is used in a picosecond laser micro-scribing experiment and the scribing effect is analyzed. The finalexperimental results show that the picosecond laser micro-scribing test is carried out with the shaped flat-top beam, and theuniform scribing effect is obtained which satisfies the design requirements.
展开▼
