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首页> 外文会议>Conference on optoelectronic interconnects, integrated circuits, and packaging >Cantilever Microscanners for Free Space Optical Interconnect
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Cantilever Microscanners for Free Space Optical Interconnect

机译：悬臂微张学互悬器用于自由空间光学互连

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摘要

Two-dimensional (2D) scanners can be used for displays, printers, optical data storage devices, optical scanning microscopes, and free-space optical interconnects. In this paper, we will describe the modeling and simulation of a novel cantilever micro-scanner. The scanner is actuated using electrostatic force. The cantilever beam connects to the top electrode. The bottom four electrodes on the substrate provide extra feedback for the control of the cantilever beam. A thorough mechanical analysis (both static and dynamic) using Finite Element Analysis has been performed. Key design parameters such as driving voltage, tilt angle and resonance frequencies have been investigated. The model has not been verified by experimental data but a fabrication process flow has been designed. The fabrication of this novel cantilever microscanner is in progress.
机译：二维（2D）扫描仪可用于显示，打印机，光学数据存储设备，光学扫描显微镜和自由空间光学互连。在本文中，我们将描述新型悬臂微扫描仪的建模和仿真。扫描仪使用静电力致动。悬臂梁连接到顶部电极。基板上的底部四电极提供额外的反馈，用于控制悬臂梁。已经进行了使用有限元分析的彻底机械分析（静态和动态）。已经研究了键设计参数，例如驱动电压，倾斜角度和谐振频率。该模型尚未通过实验数据验证，但是设计了制造过程流程。这种新型悬臂Microscanner的制造正在进行中。

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