Frequency stability of combined wavefront corrective elements for adaptive optics

机译：自适应光学组合波前矫正元件的频率稳定性

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In most adaptive optics systems, there are two elements that control wavefront correction, a fast steering mirror that corrects tip and tilt and a deformable element that corrects higher order aberrations. By mounting the deformable element onto the tip/tilt platform, complete wavefront compensation is now possible at one location in an optical system. The advantage of mounting a lightweight Micro Electro-Machined (MEM) deformable mirror on a tip/tilt stage is both fewer optical components and a simpler alignment process. The impact on the frequency stability of the of the MEM device on the tip/tilt platform is approximately 5% of the driving frequency.

机译：在大多数自适应光学系统中，有两个元件控制波前校正，校正尖端和倾斜的快速转向镜以及校正更高阶像差的可变形元件。通过将可变形元件安装到尖端/倾斜平台上，现在在光学系统中的一个位置处提供完整的波前补偿。安装在尖端/倾斜级上的轻质微电机（MEM）可变形镜的优点是较少的光学元件和更简单的对准过程。对尖端/倾斜平台上的MEM器件的频率稳定性的影响大约为驱动频率的5％。

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《Conference on MEMS/MOEMS Components and Their Applications》|2006年||共9页
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Christopher C. Wilcox; Jonathan R. Andrews; Sergio R. Restaino; Ty Martinez; Scott W. Teare; Don M. Payne; SPIE-The International Society for Optical Engineering;
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中图分类微电子学、集成电路（IC）;
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Frequency stability of combined wavefront corrective elements for adaptive optics

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