Two-dimensional diffractive optical element based fabrication of 3D photonic crystal templates

机译：基于二维衍射光学元件的3D光子晶体模板

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Recently, two-dimensional and three-dimensional periodic dielectric structures have been directly fabricated by laser holographic lithography to create novel geometric structures with high-precision tolerances. Multiple beam interference via beam splitting mirrors or diffractive optical elements produce iso-intensity contours that can be accurately recorded in photoresist and subsequently used as a template for creating photonic crystals with a complete or partial bandgap. We demonstrate single laser exposure method of forming three-dimensional photonic crystal templates in photoresist with multi-layer two-dimensional diffractive optical elements. Several photonic stopbands are identified in the near-infrared spectrum along multiple crystallographic directions.

机译：最近，通过激光全息光刻直接制造二维和三维周期性介电结构，以产生具有高精度公差的新型几何结构。通过光束分离镜或衍射光学元件的多个光束干涉产生可以精确地记录在光致抗蚀剂中的异形强度轮廓，然后用作用于产生具有完整或部分带隙的光子晶体的模板。我们展示了具有多层二维衍射光学元件的光致抗蚀剂中形成三维光子晶体模板的单激光曝光方法。沿多个晶形方向在近红外光谱中识别了几个光子阻带。

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《Conference on Photonic Crystal Materials and Devices》|2007年||共5页
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Debashis Chanda; Peter R. Herman;
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中图分类特种结构材料;
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bandgap material; holographic lithography; diffractive optical elements; finite difference time domain computation; phasemask photonic crystal; photoresist;

机译：带隙材料;全息光刻;衍射光学元件;有限差分时间域计算;PhaseMask光子晶体;光致抗蚀剂;

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专利

1. Holographic Fabrication Of Diamondlike Photonic Crystal Template Using Two-dimensional Diffractive Optical Elements [J] . Di Xu, Kevin P, Chen, Applied Physicsletters . 2008,第3期

机译：使用二维衍射光学元件全息制作类金刚石光子晶体模板
2. Flexible Holographic Fabrication of 3D Photonic Crystal Templates with Polarization Control through a 3D Printed Reflective Optical Element [J] . Murthada Adewole, Chris Tian, Jeffrey Lutkenhaus, Micromachines . 2016,第7期

机译：通过3D打印的反射光学元件进行偏振控制的3D光子晶体模板的灵活全息制作
3. Holographic fabrication of three-dimensional orthorhombic and tetragonal photonic crystal templates using a diffractive optical element [J] . Zsolt Poole, Di Xu, Kevin P. Chen, Applied Physics Letters . 2007,第25期

机译：使用衍射光学元件全息制造三维正交和四方光子晶体模板
4. Two-dimensional diffractive optical element based fabrication of 3D photonic crystal templates [C] . Debashis Chanda, Peter R. Herman Photonic Crystal Materials and Devices VI; Proceedings of SPIE-The International Society for Optical Engineering; vol.6480 . 2007

机译：基于二维衍射光学元件的3D光子晶体模板制作
5. Fabrication of two-dimensional and three-dimensional photonic crystals and templates. [D] . Divliansky, Ivan. 2004

机译：二维和三维光子晶体和模板的制造。
6. Flexible Holographic Fabrication of 3D Photonic Crystal Templates with Polarization Control through a 3D Printed Reflective Optical Element [O] . David Lowell, David George, Jeffrey Lutkenhaus, 2010

机译：通过3D打印的反射光学元件进行偏振控制的3D光子晶体模板的灵活全息制作
7. Holographic fabrication of diamondlike photonic crystal template using two-dimensional diffractive optical elements [O] . Xu Di, Chen Kevin P., Ohlinger Kris, 2008

机译：使用二维衍射光学元件全息制作类金刚石光子晶体模板

Two-dimensional diffractive optical element based fabrication of 3D photonic crystal templates

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