From SMART tools to MEMS and NEMS, SMART cards to cell phones, micro/nano satellites to space system-on-chip, quantum computing to DNA computing, research on nano and micro systems engineering is leading to changes in the way we live. Such miniaturized systems are desired for various applications as components in automobiles, aerospace vehicles, bio-medicine, informatics hardware, high performance computing, electronics, etc. Further, the events of September 11th escalated the demand for the next generation engineered systems for on and off homeland security, particularly in identifying the signs before such unfortunate events occur. The research and progress in nano-manufacturing harbors on the platform of micro and meso size tools and subsystems, which are then interfaced to the macroscopic world. Thus the research in nano as well as micro/meso materials, processes and systems enables important conventional requirements such as efficiency, portability, robustness, programmability, cost efficiency, durability, and new set of requirements such as configurability, evolutionary and adaptability, intelligent decision making abilities, realtime interacting and self powered. The last century (20th Century) has observed inception and impressive growth of microelectronics technology and related IC based systems. But it is important to remember that the challenges of the present century (21st) are not only to continue to enjoy the benefits of microelectronics and IC technology but also to explore the avenues for manufacturing multi-signal (electrical, optical, chemical, biological, etc.)/multifunctional integrated systems at nano and micro scales. One of the major trends in nano integrated micro technology is the attraction and desire to integrate nano/micro - bio - info . It is imperative that the future of science and engineering of nanomanufacfuring relies significantly on the development of fundamental understanding of materials, processes and sub-system and system behavior as well as the ability to design, synthesize, process, measure and manufacture reproducible sub-systems and systems at the nano scale. Following text provides detailed insight into the subject gathered during NSF-EC Workshop on Nanomanufacturing and Processing held in San Juan, Puerto Rico on 5-7 January 2002. The Workshop was held within the framework of the cooperation between the National Science Foundation (NSF) and the European Commission (EC, materials sciences), with the aim of catalyzing progress in research and education in the emerging field of Nanomanufacturing and processing.
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