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The STM32 and programmable power supply communication in the ELID grinding dynamic control system

机译:ELID研磨动态控制系统中的STM32和可编程电源通信

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This paper describes based on the STM32 the dynamic control systems of the ELID grinding oxide film growth process. The system's structure mainly includes the STM32 controller, DC pulse power source, VMOS circuit and optically coupled isolation circuit. The STM32 controller receives the oxide film thickness value from the host computer. According to the oxide film thickness values, the STM32 controller calls the process library automatically. Based on the process library parameters, the timer outputs the PWM square wave which the frequency and duty cycle can be adjusted, and the serial port output message controled DC power output. The PWM square wave is used to control the on-off of the VMOS circuit, which can be used as the DC converter of the programmable DC power supply, and generates high frequency pulse voltage to control the growth rate of the electrolyte. Finally, the experimental results show that DC pulse power supply output values and the expected output value are consistent.
机译:本文基于STM32基于STM32的ELID研磨氧化膜生长过程的动态控制系统。系统的结构主要包括STM32控制器,直流脉冲电源,VMOS电路和光学耦合隔离电路。 STM32控制器从主计算机接收氧化膜厚度值。根据氧化膜厚度值,STM32控制器自动调用过程库。基于过程库参数,定时器输出可以调整频率和占空比的PWM方波,并且串口输出消息控制的直流电源输出。 PWM方波用于控制VMOS电路的开关,可用作可编程DC电源的直流转换器,并产生高频脉冲电压以控制电解质的生长速率。最后,实验结果表明,DC脉冲电源输出值和预期输出值是一致的。

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