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Key Technology of Electrochemical Micromachining with Laser masking

机译：激光掩模电化学微机械的关键技术

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In order to fabricate the micro patterns cavities with micro size on 304 stainless steel, electrochemical micromachining (EMM) with laser masking based on surface modification by fiber laser masking was studied, and a device of laser-assisted EMM with the special pulse power supply was developed to achieve micro machining, which possessed the complete control system. Laser marking on the surface of 304 stainless steel can first be realized by fiber laser scanning and heating. During laser marking, metal oxide layer with pre-designed pattern can be formed by laser marking, and phase transformation can also occur at the laser scanning area on 304 stainless steel surface, which forms the laser masking layer with good corrosion resistance. The stainless steel surface with laser masking layer is subsequently etched by EMM, the laser masking layer severs as the temporary protective layer without relying on lithography mask. Accordingly, micro pattern cavities can fast be fabricated. Through machining experiments, the typical samples 23μm deep were fabricated under the optimized parameters.
机译：为了在304不锈钢上用微小尺寸制造微观图案空腔，研究了基于光纤激光掩模的表面改性的电化学微机械线（EMM），以及具有特殊脉冲电源的激光辅助EMM的装置开发实现微加工，具有完整的控制系统。通过光纤激光扫描和加热首先可以实现304不锈钢表面的激光标记。在激光标记期间，可以通过激光标记形成具有预先设计的图案的金属氧化物层，并且在304不锈钢表面上的激光扫描区域也可以发生相变，这形成具有良好耐腐蚀的激光掩模层。随后通过EMM蚀刻具有激光掩模层的不锈钢表面，激光掩模层作为临时保护层的，而不依赖于光刻掩模。因此，可以快速制造微图案空腔。通过加工实验，在优化的参数下制造典型的样品23μm深。

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