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首页> 外文会议>International Conference on Engineering Tribology and Applied Technology >Tribology Properties of IGZO Films by the Sliding Contacts of Reciprocating Motion
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Tribology Properties of IGZO Films by the Sliding Contacts of Reciprocating Motion

机译：往复运动滑动触点的冰冻膜的摩擦学特性

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In the present study, sliding tribo tests with reciprocating motion were carried out to simulate the thumb-driven wear arising in indium gallium zinc oxide (IGZO) specimens prepared at five inclination angles during film deposition. Frictional and normal forces, F_x and F_y, and vibrations were used to analyze energy dissipation (AW) and composite mean force fluctuation intensities (IF_(ss)). Friction coefficient is lowered by decreasing the mean surface roughness (R_a); its increase can raise AW. The friction coefficients of samples prepared with a nonzero inclination angle were lower than that of the IGZO_0° specimen.
机译：在本研究中，进行了往复运动的滑动摩擦试验，以模拟在薄膜沉积期间在五个倾斜角度下制备的氧化铟镓（IGZO）样本中产生的拇指驱动磨损。 使用摩擦和正常力，F_X和F_Y以及振动来分析能量耗散（AW）和复合平均力波动强度（IF_（SS））。 通过降低平均表面粗糙度（R_A）来降低摩擦系数; 它的增加可以筹集。 用非零倾斜角制备的样品的摩擦系数低于IGZO_0°样品的样品。

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