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Particle-in-cell simulation of aluminum/aluminum oxide microplasma devices

机译：铝/铝氧化铝微氧化铝器件的粒子 - 细胞仿真

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Over past decades, microplasma devices (MPDs) became popular research subject for their unique properties and wide range of applications, such as optical emitters, transistors, electron/ion sources, etc. However, MPD integration into electric circuits for consequent transition into industrial applications requires both reduction of MPD sizes and more detailed understanding of the physics behind its operation. In the presentation, we will demonstrate results of kinetic simulation of the state-of-the-art aluminum/aluminum oxide MPD, developed at UIUC [1], using Tech-X's code VORPAL. We will investigate the dependences of ignition voltage and relevant plasma parameters (such as EEDF, charge carrier density, etc.) during quasi steady-state MPD operation on the gas composition, gas pressure as well as scaling with reduction of geometrical sizes. Figure.1 shows our preliminary results on plasma generation for He/Ne mixture at 600 torr pressure.
机译：在过去的几十年中，显微血管制剂（MPDS）成为流行的研究主题，可用于其独特的性质和广泛的应用，例如光发射器，晶体管，电子/离子源等。然而，MPD集成到电路中，从而转换为工业应用。需要减少MPD大小，并更详细地了解其操作背后的物理。在演示中，我们将展示在Uiuc [1]的最先进的铝/铝氧化铝MPD的动力学模拟的结果，使用Tech-X的代码Vorpal。我们将研究点火电压和相关的等离子体参数（例如EEDF，电荷载流子密度等）在气体组合物，气体压力和降低几何尺寸的缩放期间进行点火电压和相关等离子体参数（例如EEDF，电荷载体密度等）。图1显示了我们在600托式压力下对他/ NE混合物的等离子体产生的初步结果。

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