COMPACT AND STRESS-RELEASED PISTON TIP-TILT MIRROR

机译：紧凑型和应力释放式活塞倾斜镜

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Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 μm @ 80 V with good repeatability, and a tip-tilt of up to 2 mrad @ 50 V.

机译：基于SOI技术的设备会因埋入氧化物引起的残余应力而弯曲。我们设计并制造了一种紧凑的可调式活塞倾斜式反光镜装置，其中，悬架梁的形状和布置既减小了悬架梁中的应力，又产生了光学平面镜。活塞式倾斜镜的特征是在80 V时高达18μm的精确垂直位移具有良好的可重复性，在50 V时高达2 mrad的倾斜式。

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来源
《MEMS, MOEMS, and Micromachining II》|2006年|P.61860H.1-61860H.6|共6页
会议地点 Strasbourg(FR)
作者
W. Noell; T. Overstolz; R. Stanley; N. F. de Rooij;
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作者单位

SAMLAB, Institute of Microtechnology (IMT), University of Neuchatel, SWITZERL;

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会议组织
原文格式 PDF
正文语种 eng
中图分类真空电子技术;
关键词
optical MEMS; tip-tilt actuator; vertical combdrive; micromirror; optical scanner; cavity tuning;

机译：光学MEMS;倾斜驱动器;垂直梳状驱动器;微镜;光学扫描仪;腔调整;

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专利

1. Mach-zehnder Interferometer for Piston and Tip-tilt Sensing in Segmented Telescopes: Theory and Analytical Treatment [J] . Natalia Yaitskova, Kjetil Dohlen, Philippe Dierickx Journal of the Optical Society of America, A. Optics, image science, and vision . 2005,第6期

机译：Mach-zehnder干涉仪用于分段望远镜中的活塞和倾斜倾斜感测：理论和分析处理
2. Wideband Vibrations Rejection of Tip-Tilt Mirror Using Error-Based Disturbance Observer [J] . Niu Shuaixu, Yang Tao, Tang Tao, Quality Control, Transactions . 2020,第期

机译：使用基于误差的扰动观测器抑制尖端倾斜镜的宽带振动
3. Suppressions of vibration in the Tip-Tilt mirror control system by add-on controller [J] . Tang T., Niu S. Xu, Yang T., ISA Transactions . 2020,第1期

机译：附加控制器倾斜镜像控制系统中的振动抑制
4. Compact And Stress-Released Piston Tip-Tilt Mirror [C] . T. Overstolz, W. Noell, R. Stanley, . 2006

机译：紧凑且释放应力的活塞倾斜镜
5. Dynamic model-based design, validation, and characterization of a compact, high-Inertance free liquid piston engine compressor. [D] . Willhite, Joel A. 2010

机译：基于动态模型的紧凑型，高惯量液体活塞发动机压缩机的设计，验证和特征描述。
6. An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability [O] . Liang Zhou, Xiaoyang Zhang, Huikai Xie 2019

机译：具有高可靠性的电热Cu / W双压电晶片倾斜式MEMS镜
7. Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics [O] . Jason B. Stewart*a, Thomas G. Bifanob, Paul Bierdenc, 2015

机译：设计和开发用于天基自适应光学系统的329段倾斜活塞镜阵列
8. Elliptically Framed Tip-Tilt Mirror Optimized for Stellar Tracking. [R] . Clark, I. J. H., Penado, F. E., Petak, J. 2015

机译：椭圆框架倾斜式倾斜镜，针对恒星跟踪进行了优化。

COMPACT AND STRESS-RELEASED PISTON TIP-TILT MIRROR

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