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MEMS Deformable Mirror Embedded Wavefront sensing and Control System

机译：MEMS变形镜嵌入式波前传感和控制系统

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摘要

Electrostatic Membrane Deformable Mirror (MDM) technology developed using silicon bulk micro-machining techniques offers the potential of providing low-cost, compact wavefront control systems for diverse optical system applications. Electrostatic mirror construction using bulk micro-machining allows for custom designs to satisfy wavefront control requirements for most optical systems. An electrostatic MDM consists of a thin membrane, generally with a thin metal or multi-layer high-reflectivity coating, suspended over an actuator pad array that is connected to a high-voltage driver. Voltages applied to the array elements deflect the membrane to provide an optical surface capable of correcting for measured optical aberrations in a given system. Electrostatic membrane DM designs are derived from well-known principles of membrane mechanics and electrostatics, the desired optical wavefront control requirements, and the current limitations of mirror fabrication and actuator drive electronics. MDM performance is strongly dependent on mirror diameter and air damping in meeting desired spatial and temporal frequency requirements. In this paper, we present wavefront control results from an embedded wavefront control system developed around a commercially available high-speed camera and an AgilOptics Unifi MDM driver using USB 2.0 communications and the Linux development environment. This new product, ClariFast™, combines our previous Clarifi™ product offering into a faster more streamlined version dedicated strictly to Hartmann Wavefront sensing.
机译：使用硅体微加工技术开发的静电膜可变形镜（MDM）技术具有为各种光学系统应用提供低成本，紧凑型波前控制系统的潜力。使用批量微加工的静电镜结构允许定制设计以满足大多数光学系统的波阵面控制要求。静电MDM由通常带有薄金属或多层高反射率涂层的薄膜组成，该薄膜悬挂在与高压驱动器相连的执行器焊盘阵列上。施加到阵列元件的电压使膜偏转，以提供能够校正给定系统中测得的光学像差的光学表面。静电膜DM设计源于膜力学和静电学的众所周知的原理，所需的光波前控制要求以及镜制造和致动器驱动电子设备的当前限制。 MDM性能在很大程度上取决于反射镜直径和空气阻尼，才能满足所需的空间和时间频率要求。在本文中，我们介绍了围绕波前控制结果的嵌入式波前控制系统，该系统围绕商用高速相机和使用USB 2.0通信和Linux开发环境的AgilOptics Unifi MDM驱动程序开发而成。这款新产品ClariFast™将我们以前的Clarifi™产品组合到一个更快，更简化的版本中，该版本专门用于Hartmann Wavefront传感。

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