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Large Scale Nanolaminate Deformable Mirror

机译：大型纳米层压板可变形镜

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This work concerns the development of a technology that uses Nanolaminate foils to form light-weight, deformable mirrors that are scalable over a wide range of mirror sizes. While MEMS-based deformable mirrors and spatial light modulators have considerably reduced the cost and increased the capabilities of adaptive optic systems, there has not been a way to utilize the advantages of lithography and batch-fabrication to produce large-scale deformable mirrors. This technology is made scalable by using fabrication techniques and lithography that are not limited to the sizes of conventional MEMS devices. Like many MEMS devices, these mirrors use parallel plate electrostatic actuators. This technology replicates that functionality by suspending a horizontal piece of nanolaminate foil over an electrode by electroplated nickel posts. This actuator is attached, with another post, to another nanolaminate foil that acts as the mirror surface. Most MEMS devices are produced with integrated circuit lithography techniques that are capable of very small line widths, but are not scalable to large sizes. This technology is very tolerant of lithography errors and can use coarser, printed circuit board lithography techniques that can be scaled to very large sizes. These mirrors use small, lithographically defined actuators and thin nanolaminate foils allowing them to produce deformations over a large area while minimizing weight. This paper will describe a staged program to develop this technology. First-principles models were developed to determine design parameters. Three stages of fabrication will be described starting with a 3x3 device using conventional metal foils and epoxy to a 10-across all-metal device with nanolaminate mirror surfaces.
机译：这项工作涉及一种技术的发展，该技术使用纳米层压箔来形成重量轻，可变形的反射镜，该反射镜可在各种反射镜尺寸上扩展。尽管基于MEMS的可变形反射镜和空间光调制器已大大降低了成本并提高了自适应光学系统的功能，但还没有一种方法可以利用光刻和批量制造的优势来生产大规模的可变形反射镜。通过使用不限于常规MEMS器件尺寸的制造技术和光刻技术，该技术可扩展。像许多MEMS器件一样，这些反射镜使用平行板静电致动器。该技术通过将水平的纳米层压箔片通过电镀镍柱悬挂在电极上来复制该功能。该致动器与另一支柱附接至充当镜面的另一纳米层压箔。大多数MEMS器件是采用集成电路光刻技术生产的，该技术具有非常小的线宽，但无法扩展至大尺寸。该技术非常容忍光刻错误，可以使用可以缩放到非常大尺寸的较粗糙的印刷电路板光刻技术。这些镜子使用光刻定义的小型致动器和薄的纳米层压箔，使它们可以在大面积上产生变形，同时最大程度地减轻重量。本文将描述开发该技术的分阶段计划。开发了第一性原理模型来确定设计参数。从使用常规金属箔和环氧树脂的3x3器件开始，到具有纳米层压镜面的10跨全金属器件，将描述三个制造阶段。

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