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首页> 外文会议>MEMS/MOEMS Components and Their Applications III >Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics
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Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics

机译：用于天基自适应光学系统的329段倾斜式活塞镜阵列的设计和开发

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We report on the development of a new MEMS deformable mirror (DM) system for the hyper-contrast visible nulling coronagraph architecture designed by the Jet Propulsion Laboratory for NASA's Terrestrial Planet Finding (TPF) mission. The new DM is based largely upon existing lightweight, low power MEMS DM technology at Boston University (BU), tailored to the rigorous optical and mechanical requirements of the nulling coronagraph. It consists of 329-hexagonal segments on a 600μm pitch, each with tip/tilt and piston degrees of freedom. The mirror segments have 1 μm of stroke, a tip/tilt range of 600 arc-seconds, and maintain their figure to within 2nm RMS under actuation. The polished polycrystalline silicon mirror segments have a surface roughness of 5nm RMS and an average curvature of 270mm. Designing a mirror segment that maintains its figure during actuation was a very significant challenge faced during DM development. Two design concepts were pursued in parallel to address this challenge. The first design uses a thick, epitaxial grown polysilicon mirror layer to add rigidity to the mirror segment. The second design reduces mirror surface bending by decoupling actuator diaphragm motion from the mirror surface motion. This is done using flexure cuts around the mirror post in the actuator diaphragm. Both DM architectures and their polysilicon microfabrication process are presented. Recent optical and electromechanical characterization results will also be discussed, in addition to plans for further improvement of DM figure to satisfy nulling coronagraph optical requirements.
机译：我们报告了由喷气推进实验室为美国宇航局（NASA）的地球行星发现（TPF）任务设计的，用于超对比度可见归零日冕仪结构的新型MEMS变形镜（DM）系统的开发情况。新型DM很大程度上基于波士顿大学（BU）现有的轻量级，低功耗MEMS DM技术，该技术是针对零位日冕仪的严格光学和机械要求量身定制的。它由间距为600μm的329个六边形段组成，每个段均具有尖端/倾斜角和活塞自由度。反射镜段的行程为1μm，倾斜/倾斜范围为600弧秒，并且在驱动下其图形保持在2nm RMS以内。抛光的多晶硅镜面段的表面粗糙度为5nm RMS，平均曲率为270mm。设计在致动过程中保持其身材的镜段是DM开发过程中面临的重大挑战。并行寻求两种设计概念来应对这一挑战。第一种设计使用厚的外延生长的多晶硅镜面层来增加镜面部分的刚度。第二种设计通过使致动器膜片运动与镜表面运动脱开来减少镜表面弯曲。这是通过在执行机构光阑中镜柱周围的挠曲切口完成的。介绍了DM体系结构及其多晶硅微制造工艺。除了计划进一步改进DM图以满足空化冠状图光学要求外，还将讨论最新的光学和机电表征结果。

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