High performance adaptive optics using microscale assembly

机译：使用微型组件的高性能自适应光学器件

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MicroAssembly Technologies has developed an optical MEMS process based on the batch transfer of microstructures. This "plug and play" process enables integration of ultra-flat SOI reflectors with high-aspect MEMS actuators and high-voltage CMOS driver circuits. Interferometer measurements confirm that assembled mirror devices are extremely flat.

机译：MicroAssembly Technologies已基于微结构的批量转移开发了一种光学MEMS工艺。这种“即插即用”过程使超平坦SOI反射器与高纵横比MEMS致动器和高压CMOS驱动器电路集成在一起。干涉仪的测量结果表明组装的反射镜设备非常平坦。

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来源
《MEMS/MOEMS Components and Their Applications III》|2006年|P.61130M.1-61130M.9|共9页
会议地点 San JoseCA(US)
作者
Michael Cohn; Kevin Chang; Alexros Papavasiliou; Scot Olivier; Gina Kim; Gabriel Matus; Zhixiong Xiao; Steven Cheung; KaoSio Saechao; Ryan Roehnelt;
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作者单位

MicroAssembly Technologies, 3065 Richmond Parkway, Suite 109, Richmond CA 94806;

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
adaptive optics; MEMS; microscale assembly;

机译：自适应光学MEMS微型装配;

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专利

1. Microscale adaptive optics: wave-front control with a μ-mirror array and a VLSI stochastic gradient descent controller [J] . Thomas Weyrauch, Mikhail A. Vorontsov, Thomas G. Bifano, Applied optics . 2001,第24期

机译：微型自适应光学器件：具有μ镜阵列和VLSI随机梯度下降控制器的波前控制
2. PHOTONIC FRONTIERS: ADAPTIVE OPTICS - Adapting adaptive optics to aid human vision - Adapting optics can examine the eye and diagnose vision, but don't hold your breath for adaptive lenses to correct your sight [J] . JEFF HECHT Laser Focus World: The Magazine for the Photonics & Optoelectronics Industry . 2005,第11期

机译：光子前沿：自适应光学-自适应光学器件可以辅助人的视力-自适应光学器件可以检查眼睛并诊断视力，但不要屏住呼吸以使用自适应透镜来矫正视力
3. Hierarchical self-assembly of microscale leaf-like CuO on graphene sheets for high-performance electrochemical capacitors [J] . Bing Zhao, Peng Liu, Hua Zhuang Journal of Materials Chemistry, A. Materials for energy and sustainability . 2013,第2期

机译：高性能电化学电容器在石墨烯片上的微细叶状CuO的分层自组装
4. High performance adaptive optics using microscale assembly [C] . Michael Cohn, Kevin Chang, Alexandros Papavasiliou, Conference on MEMS/MOEMS Components and Their Applications . 2006

机译：使用MicrossoStom装配的高性能自适应光学器件
5. Development of novel device assemblies and techniques for improving adaptive optics imaging systems. [D] . Haji-Saeed, Bahareh. 2006

机译：用于改进自适应光学成像系统的新型设备组件和技术的开发。
6. Performance analysis of an adaptive optics system for free-space optics communication through atmospheric turbulence [O] . Yukun Wang, Huanyu Xu, Dayu Li, -1

机译：自适应光学系统通过大气湍流进行自由空间光学通信的性能分析
7. Microscale adaptive optics : wave-front control with a µ-mirror array and a VLSI stochastic gradient descent controller [O] . Thomas Weyrauch, Mikhail A. Vorontsov, Thomas G. Bifano, 2001

机译：微尺度自适应光学系统：具有μ镜阵列的波前控制和VLsI随机梯度下降控制器
8. Adaptive Optics for the 6.5 m MMT Conversion, Development of Very High Resolution Imaging with Adaptive Optics for Large Telescopes, and Advanced Adaptive Optics for the World's Largest Telescopes [R] . Lloyd-Hart, M. , McMahon, T. 2001

机译：用于6.5米mmT转换的自适应光学系统，用于大型望远镜的自适应光学系统的高分辨率成像技术，以及用于世界上最大望远镜的高级自适应光学系统

High performance adaptive optics using microscale assembly

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