A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.374-377|共4页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Libo Zhao; Enze Huang; Guiming Zhang; Yulong Zhao; Xiaopo Wang; Zhuangde Jiang; Zhigang Liu;

  展开▼
• 作者单位

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory of Multiphase Flow in Power Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory of Multiphase Flow in Power Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  展开▼
• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  trapezoidal cantilever; rectangular cantilever; MEMS; density sensor;

  机译：梯形悬臂矩形悬臂MEMS;密度传感器;