A Biaxial Capacitive Microaccelerometer with a Single Proof-mass

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.148-153|共6页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Yu Liu; Zhiyu Wen; Li Chen; Xuefeng He; Shengqiang Wang;

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• 作者单位

  Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing University, Chongqing, China,Micro-system Research Center, Chongqing University, Chongqing, China,Automobile College, Chongqing University of Technology, Chongqing, China;

  Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing University, Chongqing, China,Micro-system Research Center, Chongqing University, Chongqing, China;

  Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing University, Chongqing, China,Micro-system Research Center, Chongqing University, Chongqing, China;

  Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing University, Chongqing, China,Micro-system Research Center, Chongqing University, Chongqing, China;

  Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing University, Chongqing, China,Micro-system Research Center, Chongqing University, Chongqing, China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  MEMS accelerometers; biaxial capacitive sensors; microstructure; bulk silicon micromachining; multidisciplinary design optimization;

  机译：MEMS加速度计；双轴电容传感器微观结构体硅微加工；多学科设计优化;