Development of the 400MHz Power Durable SAW Filter

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.381-386|共6页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  GAO Yang; CHEN Ying-Duan; XI Shi-Wei; ZHENG Ying-Bin; ZHANG Chao;

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• 作者单位

  Institute of Electronic Engineering, China Academy of Engineering Physics, P.O. Box 919-512, Mianyang 621900, Sichuan, P. R. China;

  School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, Sichuan, P. R. China;

  Institute of Electronic Engineering, China Academy of Engineering Physics, P.O. Box 919-512, Mianyang 621900, Sichuan, P. R. China;

  Institute of Electronic Engineering, China Academy of Engineering Physics, P.O. Box 919-512, Mianyang 621900, Sichuan, P. R. China;

  Institute of Electronic Engineering, China Academy of Engineering Physics, P.O. Box 919-512, Mianyang 621900, Sichuan, P. R. China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  RF MEMS; SAW; filter; diamond film; piezoelectric thin film; IDT;

  机译：RF MEMS;锯;过滤;金刚石膜压电薄膜IDT;