A High-performance Fourth-order Sigma-delta Micro-machined Accelerometer

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.422-426|共5页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Yaoguang Li; Xiaowei Liu; Yan Xiao; Yuntao Liu;

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• 作者单位

  MEMS Center, Harbin Institute of Technology, Harbin, 150001, China;

  MEMS Center, Harbin Institute of Technology, Harbin, 150001, China;

  MEMS Center, Harbin Institute of Technology, Harbin, 150001, China;

  College of Information and Communication Engineering, Harbin Engineering University, Harbin 150001, China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  micro-machined; accelerometer; quantization noise; sigma-delta; system;

  机译：微加工加速度计量化噪声西格玛-德尔塔系统;