Experimental Study of Cushion Materials for Microaccelerometers under shock load

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.232-236|共5页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Wang Shitao; Jia Yubin; Zhang Binzhen; Lei Yinhua; Huang Qinwen; Hao Yilong;

  展开▼
• 作者单位

  Institute of Microelectronics, Peking University, Beijing 100871, P. R. China,National Key Laboratory of Science and Technology on Reliability Physics and Application Technology of Electrical Component, the 5th Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou 510610, P. R. China;

  Institute of Microelectronics, Peking University, Beijing 100871, P. R. China;

  Institute of Microelectronics, Peking University, Beijing 100871, P. R. China;

  Institute of Microelectronics, Peking University, Beijing 100871, P. R. China;

  National Key Laboratory of Science and Technology on Reliability Physics and Application Technology of Electrical Component, the 5th Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou 510610, P. R. China;

  Institute of Microelectronics, Peking University, Beijing 100871, P. R. China;

  展开▼
• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  cushion materials; aluminum foam; metal rubber; microaccelerometer;

  机译：缓冲材料；泡沫铝金属橡胶；微加速度计;