Design of the Cascaded Open-Channel Direct Current Electroosmotic Pump

机译：级联明渠直流电渗泵的设计

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Electroosmotic pump does not need moving mechanical parts, which can be fabricated by micromachining process and integrated with other micro-devices. Electroosmotic pump is the hydraulic actuator component and can be used in HPLC (High Pressure Liquid Chromatography), μTAS (Micro totally analysis system), chip test system, micro cooling system and micro drug delivery system, etc. The paper is to design an electroosmotic pump with low driving voltage, high pressure and high flow rate, and fabricate the samples of cascaded open-channel direct current electroosmotic pump. The three-dimensional model of one-stage parallel open-channel electroosmotic pump is established by finite element analysis software of CoventorWare. The numerical simulation of the electroosmotic pump performance has been done by CoventorWare. Compared with the equivalent circuit model, the results show that the cascaded open-channel direct current electroosmotic pump has the advantages of high flow rate and high pressure.

机译：电渗泵不需要移动的机械零件，可以通过微机械加工工艺制造并与其他微设备集成。电渗泵是液压执行器组件，可用于HPLC（高压液相色谱），μTAS（微全分析系统），芯片测试系统，微冷却系统和微药物输送系统等。本文旨在设计一种电渗泵具有低驱动电压，高压力和高流量的泵，并制造级联明渠直流电渗泵的样品。利用CoventorWare的有限元分析软件建立了一级并联开放式电渗泵的三维模型。电渗泵性能的数值模拟已由CoventorWare完成。与等效电路模型相比，结果表明级联明渠直流电渗泵具有流量大，压力高的优点。

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来源
《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.259-263|共5页
会议地点 Xian(CN);Xian(CN)
作者
LIU Tingting; BAI Zhuchuan; GAO Yang;
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作者单位

School of Information Engineering, Southwest University of Science and Technology, China;

School of Information Engineering, Southwest University of Science and Technology, China;

Institute of Electronic Engineering, China Academy of Engineering Physics, China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;微电子学、集成电路（IC）;
关键词
MEMS; electroosmotic micro-pump; microfluidics; simulation; microfabrication;

机译：MEMS;电渗微型泵微流体模拟;微细加工;

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Design of the Cascaded Open-Channel Direct Current Electroosmotic Pump

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