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Infrared Absorptance of Wavelength-Selection Trapezoid Grating

机译：波长选择梯形光栅的红外吸收率

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摘要

The wavelength-selection trapezoid gratings which can improve the infrared absorptance contrast are demonstrated. The spectral absorptance of silicon trapezoid grating is studied by using the rigorous coupled-wave analysis (RCWA) numerical scheme. The optical performance of the trapezoid gratings with different side-wall slopes on the groove ridge is calculated and analyzed. According to the analyzed results, the side-wall slope of the trapezoid grating plays an important role for enhancing the contrast of the infrared absorptance. It is found that the absorptance peak is located at the wavelength of 7.0 μm, which is equal to the period of the trapezoid grating. The maximum spectral absorptance contrast is given at the proper side-wall slope of groove ridge of the trapezoid gratings. The influences of the oblique incident light are also analyzed. When the incident angle increases, the absorptance peak deviates from the original location of the normal incident condition. The absorptance peak not only decreases its magnitude but also be split.
机译：对提高红外吸收率对比度的波长选择梯形光栅进行了说明。利用严格的耦合波分析（RCWA）数值方案研究了硅梯形光栅的光谱吸收率。计算并分析了槽脊上具有不同侧壁斜率的梯形光栅的光学性能。根据分析结果，梯形光栅的侧壁斜率对增强红外吸收率的对比度起着重要作用。发现吸收率峰位于7.0μm的波长处，该波长等于梯形光栅的周期。在梯形光栅的槽脊的适当侧壁斜率处给出最大的光谱吸收比。还分析了斜入射光的影响。当入射角增加时，吸收率峰会偏离正常入射条件的原始位置。吸收峰不仅减小了其幅度，而且被分裂了。

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