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Influence of Fin Width on the Intrinsic Voltage Gain of Standard and Strained Triple-Gate nFinFETs

机译:鳍宽度对标准和应变三栅极nFinFET的固有电压增益的影响

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摘要

This work studies the influence of the fin width on the intrinsic voltage gain of standard and strained Si (sSOI) n-type triple-gate FinFETs with high-k dielectrics and metal gate. It is demonstrated that independent of the fin width the application of strain improves the device transconductance. On the other hand, the device output conductance shows a high dependence on the fin width in strained FinFETs with respect to standard ones. The output conductance degrades if narrow fins are used and improves for wide fins. Narrow strained FinFETs show a degradation of the Early voltage compared to standard ones suggesting that strained devices are more subjected to the channel length modulation effect.
机译:这项工作研究了鳍宽度对具有高k电介质和金属栅的标准和应变Si(sSOI)n型三栅FinFET的固有电压增益的影响。结果表明,与鳍片宽度无关,应变的施加改善了器件的跨导。另一方面,相对于标准FinFET,器件输出电导对应变FinFET中的鳍宽度高度依赖。如果使用窄鳍,输出电导会降低,而对于宽鳍,输出电导会提高。与标准的相比,窄应变的FinFET显示出早期电压的下降,这表明应变器件更容易受到沟道长度调制的影响。

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  • 会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
  • 作者单位

    Department of Electrical Engineering, Centro Universitario da FEI, Av. Humberto de Alencar Castelo Branco, 3972, 09850-901, Sao Bernardo do Campo, Brazil LSI/PSI/USP, University of Sao Paulo Av. Prof. Luciano Gualberto, trav. 3 n. 158, 05508-900, Sao Paulo, Brazil;

    LSI/PSI/USP, University of Sao Paulo Av. Prof. Luciano Gualberto, trav. 3 n. 158, 05508-900, Sao Paulo, Brazil;

    IMEC, Kapeldreef 75, B-3001 Leuven, Belgium;

    IMEC, Kapeldreef 75, B-3001 Leuven, Belgium;

    IMEC, Kapeldreef 75, B-3001 Leuven, Belgium;

    E.E. Dept., KU Leuven, Kasteelpark Arenberg 10, B-3001 Leuven, Belgium IMEC, Kapeldreef 75, B-3001 Leuven, Belgium E.E. Dept., KU Leuven, Kasteelpark Arenberg 10, B-3001 Leuven, Belgium;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路(IC);
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