Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell

机译：电感耦合等离子体中的等离子体诊断-气体电子会议参考单元

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An Inductively Coupled Plasma - Gaseous Electronics Conference reference cell was studied by different diagnostics: laser induced fluorescence, Langmuir probe, optical emission spectroscopy (Ar line ratios) and coil electrical measurements. Two modes of operation (high and low density plasma) were analyzed. A hysteresis in the transition between modes is identified only when the applied power is considered. When the plasma power is considered (coil losses are subtracted), the plasma parameters showed a smooth behavior between the two modes. The comparison of the plasma parameters obtained by different diagnostics showed a good agreement, revealing differences in the electron energy distribution function and the usefulness of Ar line ratio method.

机译：电感耦合等离子体-气体电子会议参考电池已通过不同的诊断方法进行了研究：激光诱导荧光，Langmuir探针，光发射光谱法（Ar线比）和线圈电学测量。分析了两种操作模式（高密度等离子体和低密度等离子体）。仅当考虑施加的功率时，才能识别模式之间过渡中的磁滞。考虑等离子功率（减去线圈损耗）后，等离子参数在两种模式之间显示出平滑的行为。通过不同诊断方法获得的等离子体参数的比较显示出很好的一致性，揭示了电子能量分布函数和Ar线比法的实用性方面的差异。

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《Microelectronics Technology and Devices-SBMicro 2008》|2008年|365-373|共9页
会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
作者
A. M. Daltrini; S. A. Moshkalev; T. J. Morgan; R. B. Piejak; W. G. Graham;
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作者单位

Centra de Excelencia em Tecnologia Eletronica Avangada - CEITEC, Porto Alegre, RS 91550-000, Brazil;

Universidade Estadual de Campinas, Unicamp, Center for Semiconductor Components, PO box 6061, Campinas, SP 13083-870, Brazil;

Department of Physics, Wesleyan University, Middletown, Connecticut 06457, USA;

Centre for Plasma Physics, Department of Physics and Astronomy, Queen's University Belfast BT 7 1NN, Northern Ireland;

Centre for Plasma Physics, Department of Physics and Astronomy, Queen's University Belfast BT 7 1NN, Northern Ireland;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
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专利

1. An Inductively Coupled Plasma Source for the Gaseous Electronics Conference RF Reference Cell [J] . Paul A. Miller, Gregory A. Hebner, Kenneth E. Greenberg, Journal of Research of the National Institute of Standards and Technology . 1995,第4期

机译：气态电子会议射频参考电池的电感耦合等离子体源
2. The Gaseous Electronic Conference (GEC) reference cell as a benchmark for understanding microelectronics processing plasmas [J] . Brake ML., Fournier J., Pender J. Physics of plasmas . 1999,第5aPta2期

机译：气体电子会议（GEC）参考单元作为了解微电子处理等离子体的基准
3. Electrical Characterization Of An Inductively Coupled Gaseous Electronics Conference Reference Cell [J] . S, V, Singh, Journal of Applied Physics . 2008,第8期

机译：电感耦合气态电子会议参考电池的电气特性
4. Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell [C] . A. M. Daltrini, S. A. Moshkalev, T. J. Morgan, Symposium on Microelectronics Technology and Devices . 2008

机译：电感耦合等离子体电子电子会议参考单元中的等离子体诊断
5. The characterization of plasma-surface interactions using the inductively coupled gaseous electronics conference reference cell platform. [D] . Joseph, Eric Andrew. 2005

机译：使用感应耦合气态电子会议参考单元平台对等离子体-表面相互作用进行表征。
6. An Inductively Coupled Plasma Source for the Gaseous Electronics Conference RF Reference Cell [O] . Paul A. Miller, Gregory A. Hebner, Kenneth E. Greenberg, 1995

机译：气态电子会议射频参考电池的电感耦合等离子体源
7. Particle trapping, transport and charge in capacitively and inductively-coupled plasmas in a gaseous electronics conference RF reference cell [O] . Collins Sean Michael 1959- 1997

机译：气体电子会议射频参考电池中电容性和电感性耦合等离子体中的粒子捕获，传输和电荷
8. Inductively Coupled Plasma Source for the Gaseous Electronics Conference RFReference Cell [R] . Miller, P. A., Hebner, G. A., Greenberg, K. E., 1995

机译：用于气体电子会议RFReference Cell的电感耦合等离子体源

Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell

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