TiO_2 ANTI-RESONANT LAYER ARROW WAVEGUIDES

机译：TiO_2反共振层箭头

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The simulation, fabrication and characterization of ARROW waveguides using dielectric films deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) and Sputtering techniques, are presented in this work. Amorphous titanium oxide (TiO_2) films were used as first cladding layer and silicon oxynitride (SiO_xN_y) films, as core and second cladding layers. Furthermore, homemade routines based in two computational methods were developed, for numerical simulations: Transfer Matrix Method (TMM) for the determination of the optimum thickness values of the Fabry-Perot layers, and the Finite Difference Method (FDM) for 2D design and determination of the maximum width that allows single-mode operation. The utilization of titanium oxide as first anti-resonant layer resulted in low optical attenuations, since high interlayer refractive index differences can be obtained.

机译：本工作介绍了使用等离子增强化学气相沉积（PECVD）和溅射技术沉积的介电膜对ARROW波导进行的仿真，制造和表征。非晶态氧化钛（TiO_2）薄膜用作第一覆层，氮氧化硅（SiO_xN_y）薄膜用作芯层和第二覆层。此外，还开发了基于两种计算方法的自制例程，用于数值模拟：用于确定Fabry-Perot层最佳厚度值的传递矩阵法（TMM），以及用于2D设计和确定的有限差分法（FDM）。允许单模操作的最大宽度的最大值。利用氧化钛作为第一抗谐振层导致低的光学衰减，因为可以获得高的层间折射率差。

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《Microelectronics Technology and Devices-SBMicro 2008》|2008年|511-520|共10页
会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
作者
D.O.Carvalho; M.I.Alayo;
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作者单位

PSI, EPUSP, University of Sao Paulo, CEP 05424-970, Sao Paulo, SP, Brazil;

PSI, EPUSP, University of Sao Paulo, CEP 05424-970, Sao Paulo, SP, Brazil;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
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1. a-SiC:H anti-resonant layer ARROW waveguides [J] . DOCarvalho, M I Alayo Journal of optics, A. Pure and applied optics: journal of the European Optical Society . 2008,第10期

机译：a-SiC：H反谐振层ARROW波导
2. The application of leaky anti-resonant reflecting optical waveguides as optical sensors (L-ARROW) [J] . John P. Hulme, Seong Soo A. An Sensors and Actuators . 2009,第1期

机译：泄漏反共振反射光波导作为光传感器的应用（L-ARROW）
3. Asymmetric anti-resonant reflecting optical waveguides (arrow) as chemical sensors [J] . Nicholas J.Goddard, John Hulme, Chris Malins, The Analyst: The Analytical Journal of the Royal Society of Chemistry: A Monthly International Publication Dealing with All Branches of Analytical Chemistry . 2002,第3期

机译：非对称反共振反射光波导（箭头）作为化学传感器
4. A1N anti-resonant layer ARROW waveguides [C] . M.V.Pelegrini, rnD.O. Carvalho, rnM. I. Alayo, Optical components and materials VII . 2010

机译：AlN反谐振层ARROW波导
5. Analysis and application of evanescent field enhancement in multi-layer arrow waveguide. [D] . Abdullah, Alisher. 2002

机译：瞬态场增强在多层箭头波导中的分析与应用。
6. Optofluidic Lab-on-a-Chip Fluorescence Sensor Using Integrated Buried ARROW (bARROW) Waveguides [O] . Thomas Wall, Johnny McMurray, Gopikrishnan Meena, 2017

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7. The Influence of Structure and Processing on the Behavior of TiO_2 Protective Layers for Stabilization of n-Si/TiO_2/Ni Photoanodes for Water Oxidation [O] . McDowell Matthew T., Lichterman Michael F., Carim Azhar I., 2015

机译：结构和工艺对用于稳定水氧化n-Si / TiO_2 / Ni光阳极的TiO_2保护层行为的影响
8. Design and Analysis of Transitions From Rectangular Waveguide to Layered Ridge Dielectric Waveguide [R] . Ponchak, George E., Dib, Nihad I., Katehi, Linda P. B. 1996

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TiO_2 ANTI-RESONANT LAYER ARROW WAVEGUIDES

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