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A Possible Tool For Fabricating Electronic Devices Through Local Electrochemistry

机译:通过局部电化学制造电子设备的可能工具

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In the past few decades there has been significant advances in the processes of nanofabrication of semiconductors. For instance, some groups have reported the incorporation of organic molecules (1-3) and quantum effect devices (4,5) in integrated circuits. One of the most prominent tools for manipulating the matter at this scale is the scanning probe microscope (SPM). This instrument, firstly conceived by G. Binnig (6) in 1982, operates in different modes. Scanning probe microscopes that sense the atomic interaction between the probe and the surface are known as atomic force microscopes (AFM), whereas those that sense a tunneling current between them are known as scanning tunneling microscopes (STM) (7). The field of scanning probes has grown rapidly since the advent of these two models and there is now a myriad of variations such as the scanning near field optical microscope (SNOM) (8), the magnetic force microscope (MFM) (9,10) and the electrostatic force microscope (EFM) (11).rnHere we show the development of an AFM/STM dedicated to the process of local electrochemical deposition (12), which is a new and promising tool for nanostructuring surfaces.
机译:在过去的几十年中,半导体的纳米制造工艺取得了重大进展。例如,一些研究小组报告说,有机分子(1-3)和量子效应器件(4,5)被引入集成电路中。以此规模处理物质的最杰出工具之一是扫描探针显微镜(SPM)。该仪器最初由G. Binnig(6)于1982年构思,以不同的模式运行。感应探针和表面之间原子相互作用的扫描探针显微镜称为原子力显微镜(AFM),而感应探针和表面之间的隧穿电流的扫描探针显微镜称为扫描隧道显微镜(STM)(7)。自这两个模型问世以来,扫描探针的领域发展迅速,现在存在无数种变化,例如扫描近场光学显微镜(SNOM)(8),磁力显微镜(MFM)(9,10)以及静电力显微镜(EFM)(11)。在这里,我们展示了致力于局部电化学沉积(12)的AFM / STM的发展,它是用于纳米结构化表面的一种新的有前途的工具。

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