Multiwall Carbon Nanotubes Thin Film Deposition with the Help of Symmetric Focused Surface Acoustic Wave Atomizers

机译：借助对称聚焦表面声波雾化器实现多壁碳纳米管薄膜沉积

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Recently, it was shown that the thin films of multiwall carbon nanotubes (MWCNTs) can be used as the sensitive films in electronic (1) or SAW (2) sensors. In order to produce this type of thing films, a suspension of MWCNTs in some solvent is sprayed on the surface of the sample. Traditional spray coating method was designed to cover relatively large areas. But it is difficult to obtain very thin uniform films by this method, because the process of drying up of a bulky liquid layer from the surface of the sample can result in non-uniform aggregation of the solid component of the mixture.

机译：最近，显示出多壁碳纳米管（MWCNT）的薄膜可用作电子（1）或SAW（2）传感器中的敏感膜。为了生产这种物膜，将MWCNT在某种溶剂中的悬浮液喷涂到样品表面。传统的喷涂方法被设计为覆盖相对较大的区域。但是通过这种方法很难获得非常薄的均匀膜，因为从样品表面干燥大体积液体层的过程可能导致混合物中固体成分的不均匀聚集。

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《Microelectronics technology and devices - SBMicro 2010》|2010年|p.267-272|共6页
会议地点 Sao Paulo(BR);Sao Paulo(BR)
作者
O. V. Balachova; S. M. Balashov; A. Pavani Filho; M G. de Almeida;
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作者单位

Microsystems and Packaging Division, Information Technology Center - CTI,Campinas-SP, 13069-901, Brazil;

Microsystems and Packaging Division, Information Technology Center - CTI,Campinas-SP, 13069-901, Brazil;

Microsystems and Packaging Division, Information Technology Center - CTI,Campinas-SP, 13069-901, Brazil;

Microsystems and Packaging Division, Information Technology Center - CTI,Campinas-SP, 13069-901, Brazil;

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1. Deposition of Thin Films of Nanomaterials by the Surface Acoustic Wave Atomizer [J] . O. V. Balachova, S. M. Balashov, A. Pavani Filho Smart nanocomposites . 2012,第2期

机译：表面声波雾化器沉积纳米材料薄膜
2. Frequency Response of Thin-Film Bulk Acoustic Resonators to the Deposition of Tungsten, Platinum, Aluminium Oxide and Carbon Nanotube Thin-Films [J] . Martin Nirschl, Daniel Sickert, Ozlem Karaca, Micro and Nanosystems . 2012,第2期

机译：薄膜体声谐振器对钨，铂，氧化铝和碳纳米管薄膜沉积的频率响应
3. Structural, Field Emission and Ammonia Gas Sensing Properties of Multiwalled Carbon Nanotube-Graphene Like Hybrid Films Deposited by Microwave Plasma Enhanced Chemical Vapor Deposition Technique [J] . Bisht Atul, Chockalingam S., Panwar O. S., Science of advanced materials . 2015,第7期

机译：微波等离子体化学气相沉积技术沉积多壁碳纳米管-石墨烯类杂化膜的结构，场发射和氨气传感特性
4. Multiwall Carbon Nanotubes Thin Film Deposition with the Help of Symmetric Focused Surface Acoustic Wave Atomizers [C] . O. V. Balachova, S. M. Balashov, A. Pavani Filho, Symposium on microelectronics technology and devices . 2010

机译：多壁碳纳米管薄膜沉积在对称聚焦表面声波雾化器的帮助下
5. The deposition of aluminum nitride thin films, their characterization and the fabrication of surface acoustic wave devices [D] . Fansler, Charlee 2007

机译：氮化铝薄膜的沉积，其特征和表面声波装置的制造
6. Hybrid Surface Acoustic Wave- Electrohydrodynamic Atomization (SAW-EHDA) For the Development of Functional Thin Films [O] . Kyung Hyun Choi, Hyun Bum Kim, Kamran Ali, -1

机译：用于功能薄膜开发的混合表面声波-电流体动力雾化（SAW-EHDA）
7. Structural, Field Emission and Ammonia Gas Sensing Properties of Multiwalled Carbon Nanotube-Graphene Like Hybrid Films Deposited by Microwave Plasma Enhanced Chemical Vapor Deposition Techniqueud [O] . Bisht Atul, Chockalingam S., Panwar O. S., 2015

机译：微波等离子体增强化学气相沉积技术沉积多壁碳纳米管 - 石墨烯复合薄膜的结构，场发射和氨气敏特性

Multiwall Carbon Nanotubes Thin Film Deposition with the Help of Symmetric Focused Surface Acoustic Wave Atomizers

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