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首页> 外文会议>Microelectronics technology and devices - SBMicro 2010 >Nano-Crystalline Palladium-Film Catalysts Deposited By E-beam Evaporation Aiming Hydrogen Sensing
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Nano-Crystalline Palladium-Film Catalysts Deposited By E-beam Evaporation Aiming Hydrogen Sensing

机译：电子束蒸发沉积的纳米晶钯膜催化剂

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摘要

Hydrogen is present in several application sectors such as metallurgical industries (undesirable during the fabrication of some kinds of metals and steel); chemical industries aiming thermal isolation (1), as fuel in several chemicals, oil and gases industries (2); in oil transformers (3, 4), in spacecrafts as a propulsion system and so on. Moreover, hydrogen is considered as a powerful alternative energy source and has been widely studied for many researchers throughout the years (5, 6). Meanwhile, the hydrogen gas can not be detected by the human olfative system (from 4% to 75%) (7), and is highly inflamable making the development of sensors imperative, (8, 9, 10, 11, 12, 13, 14, 15). This work is focused on the development of palladium-film catalysts deposited by e-beam evaporation technique and on the evaluation of their behavior in hydrogen sensing after annealing under air and forming gas expositions. The catalysts films are characterized by dissociating hydrogen gas and its compounds (NH_3, C_2H_5OH, C_2H-2, CH_4) increasing the adsorption rate of the element and are vital for the development of semiconductor-based sensors. During the adsorption process, the hydrogen changes some of the characteristics of the films such as morphology (surface characteristics) and electrical properties (resistance and sheet resistance) (16).
机译：氢气存在于冶金工业等多个应用领域（某些金属和钢的制造过程中不希望有）；旨在隔热的化学工业（1），在一些化学，石油和天然气工业中作为燃料（2）；在石油变压器（3、4）中，在航天器中作为推进系统，等等。此外，氢被认为是一种强大的替代能​​源，多年来，许多研究人员对其进行了广泛的研究（5、6）。同时，人的嗅觉系统无法检测到氢气（从4％到75％）（7），并且氢气具有高度易燃性，因此必不可少的传感器发展（8，9，10，11，12，12，13， 14、15）。这项工作的重点是通过电子束蒸发技术沉积的钯膜催化剂的开发，以及在空气中退火和形成气体后对氢感测行为的评估。催化剂膜的特征是使氢气及其化合物（NH_3，C_2H_5OH，C_2H-2，CH_4）离解，从而增加了元素的吸附速率，这对于开发基于半导体的传感器至关重要。在吸附过程中，氢会改变薄膜的某些特性，例如形态（表面特性）和电特性（电阻和薄层电阻）（16）。

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