首页> 外文会议>Microelectronics technology and devices - SBMicro 2011 >Evaluation of Low Cost Metallization Process for Power Electronic Modules by Wire Wedge Bond Process on Nickel/Copper and Nickel/Copper/Silver Pads
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Evaluation of Low Cost Metallization Process for Power Electronic Modules by Wire Wedge Bond Process on Nickel/Copper and Nickel/Copper/Silver Pads

机译:镍/铜和镍/铜/银焊盘上的引线楔焊工艺对电力电子模块低成本金属化工艺的评估

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摘要

Wire-bonding is the dominant method used for chip interconnections and it is very important to the development and manufacturing of power electronic modules. It has been used in microelectronic packaging for years using aluminum or gold wire. In this work, a low cost process using wire wedge bond on nickel/copper and nickel/copper/silver metal stack are presented. Rupture tests were performed in order to investigate the mechanical reliability of the metal layer for wire bonding application.
机译:引线键合是芯片互连的主要方法,对于功率电子模块的开发和制造非常重要。多年来,它已使用铝线或金线用于微电子包装。在这项工作中,提出了一种在镍/铜和镍/铜/银金属叠层上使用楔形焊的低成本工艺。进行破裂试验以研究用于引线键合应用的金属层的机械可靠性。

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  • 来源
  • 会议地点 Joao Pessoa(BR);Joao Pessoa(BR)
  • 作者单位

    SEMIKRON Semicondutores Ltda. Av. Inocencio Serafico, 6300, CEP 06366-900 - Carapicuiba - Sao Paulo;

    SEMIKRON Semicondutores Ltda. Av. Inocencio Serafico, 6300, CEP 06366-900 - Carapicuiba - Sao Paulo;

    SEMIKRON Semicondutores Ltda. Av. Inocencio Serafico, 6300, CEP 06366-900 - Carapicuiba - Sao Paulo;

    SEMIKRON Semicondutores Ltda. Av. Inocencio Serafico, 6300, CEP 06366-900 - Carapicuiba - Sao Paulo;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
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