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首页> 外文会议>Microfluidics, BioMEMS, and Medical Microsystems IV >Characterization of SU-8 optical multimode waveguides for integrated optics and sensing on microchip devices
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Characterization of SU-8 optical multimode waveguides for integrated optics and sensing on microchip devices

机译：SU-8光学多模波导的特性，用于集成光学器件和微芯片器件上的传感

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Our research group is interested in environmental sensing of heavy metals that are involved in pollution of aqueous environments. As a result, we are developing chemical sensors within integrated microfluidic systems for sensitive and selective detection of these pollutants. Our approach is to combine established chemical sensing strategies with microfluidic structures, especially in plastic devices, to achieve a total heavy metal analysis system. In this regard, the combination of three complementary techniques - optical waveguide spectroscopy, electrochemistry and chemical partitioning offers the required selectivity and sensitivity essential for many environmental samples. On-chip optical waveguide spectroscopy promises to yield the necessary high sensitivity but relies on fabrication of optical structures with a material of appropriate refractive index, optical quality, and chemical stability by methods consistent with established fabrication methods. SU-8, the epoxy-based negative photoresist, appears to satisfy these requirements and, thus, has become one of our candidate materials for waveguide fabrication on plastic microchips. Although the SU-8 has been previously used for waveguide fabrication, its optical properties and more specifically the influence of processing conditions on resultant optical properties have not been thoroughly characterized. This work presents an evaluation of SU-8-based multimode waveguides on glass and plastic substrates. Optical constants of waveguides have been characterized by spectroscopic ellipsometric and prism coupling techniques. Additionally, using the latter method, evaluation of propagation losses of various structures with different thicknesses has been made. Ellipsometric and prism coupling measurements gave comparable refractive indices for variously cured SU-8 waveguide materials. Prism coupling analyses proved to be more useful for analysis of the many SU-8 waveguide structures fabricated in the thickness range of 5 to 75 μm.
机译：我们的研究小组对与水环境污染有关的重金属进行环境传感感兴趣。因此，我们正在集成微流体系统内开发化学传感器，用于灵敏和选择性地检测这些污染物。我们的方法是将已建立的化学传感策略与微流体结构相结合，尤其是在塑料设备中，以实现总的重金属分析系统。在这方面，三种互补技术的组合-光波导光谱法，电化学和化学分配技术可提供许多环境样品必不可少的所需选择性和灵敏度。片上光波导光谱有望产生必要的高灵敏度，但依赖于采用与既定制造方法相一致的方法制造的具有适当折射率，光学质量和化学稳定性的材料的光学结构。 SU-8（基于环氧的负性光刻胶）似乎可以满足这些要求，因此已成为我们在塑料微芯片上制造波导的候选材料之一。尽管SU-8以前已用于波导制造，但尚未对其光学特性，尤其是加工条件对所得光学特性的影响进行全面表征。这项工作提出了在玻璃和塑料基板上基于SU-8的多模波导的评估。波导的光学常数已经通过椭圆偏振光谱和棱镜耦合技术进行了表征。另外，使用后一种方法，已经评估了具有不同厚度的各种结构的传播损耗。椭圆和棱镜耦合测量结果为各种固化的SU-8波导材料提供了可比的折射率。事实证明，棱镜耦合分析对于分析厚度范围为5至75μm的许多SU-8波导结构更为有用。

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