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首页> 外文会议>Microfluidics, BioMEMS, and Medical Microsystems IV >Micro-Cantilever Resonance Sensor for Biomolecular Detection by Using Self-Assembly Nano-Particles
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Micro-Cantilever Resonance Sensor for Biomolecular Detection by Using Self-Assembly Nano-Particles

机译：通过使用自组装纳米粒子的生物分子检测的微悬臂梁共振传感器。

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摘要

In recent years, highly sensitive and selective as well as cost-effective sensing and detection of bio-molecules (e.g. virus, bacterial, DNA and protein) by MEMS/NEMS (Micro-/Nano Electro- Mechanical-System) structures have attracted extensive attention for its importance in clinical diagnostics, treatment, and various genome projects. Meanwhile, Substantial research efforts have been spent on the improvement of sensitivity of BioMEMS structures. Among a variety of methods that have been investigated, surface modification by nanoparticles (NPs) turns out to be an attractive way, which provides a platform for the enhancement of the sensitivity for biosensor devices. However, conventional applications for surface modification were mostly implemented on microelectrodes. This paper is going to present the self-assembly surface binding of nano-gold particle and functional MWCNT on the cantilever sensor, which can easily facilitate biomolecular detection by resonance frequency shift. Its sensitivity can be improved due to the large binding area of probes to the targeting bio-molecules. The LPCVD SiN low-stress rectangular cantilever is produced by laser micromachining and alkaline KOH etching, which is a maskless, simple, convenient, fast-prototyping way to produce such cantilever sensor for biomolecular detection. The commercially available Atomic Force Microscopy (AFM) cantilevers are also used to verify the concept.
机译：近年来，通过MEMS / NEMS（微/纳米电子机械系统）结构对生物分子（例如病毒，细菌，DNA和蛋白质）进行高灵敏度和选择性以及具有成本效益的感测和检测已吸引了广泛的关注。因其在临床诊断，治疗和各种基因组计划中的重要性而受到关注。同时，已经进行了大量的研究努力来提高生物MEMS结构的灵敏度。在已研究的各种方法中，通过纳米粒子（NP）进行表面修饰是一种有吸引力的方法，它为增强生物传感器设备的灵敏度提供了平台。然而，表面修饰的常规应用大多在微电极上实现。本文将介绍纳米金颗粒和功能性MWCNT在悬臂传感器上的自组装表面结合，通过共振频率偏移可以很容易地促进生物分子检测。由于探针与靶向生物分子的结合面积较大，因此可以提高其灵敏度。 LPCVD SiN低应力矩形悬臂梁是通过激光微加工和碱性KOH蚀刻生产的，这是无掩模，简单，方便，快速成型的方法，可用于生产用于生物分子检测的悬臂梁传感器。市售的原子力显微镜（AFM）悬臂也用于验证这一概念。

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