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首页> 外文会议>Microfluidics, bioMEMS, and medical microsystems XI >Fabrication of microano-fluidic channels by single-beam direct femtosecond laser writing
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Fabrication of microano-fluidic channels by single-beam direct femtosecond laser writing

机译：单束直接飞秒激光写入技术制造微/纳流体通道

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摘要

In this paper, we report on the formation of microano-fluidic channels inside fused silica glass using single-beam femtosecond laser. The microano-fluidic channels are fabricated by controlling the irradiation conditions of the femtosecond laser pulses, especially, pulse energy and scanning speed. We examine the production of this kind of channels both in air and water. In both cases, laser beam is focused inside the glass bar and shined horizontally with very low scanning speeds. In case of water, the glass sample is placed inside distilled water, which way is expected to reduce the surface roughness of the channels. The quality of the channels fabricated under different environment is compared as well. We further investigate the influence of various laser parameters on the production of channels. We also evaluate the fluid flowing ability of the fabricated microano-fluidic channels of various diameters, fabricated under different environment and irradiation conditions.
机译：在本文中，我们报告了使用单束飞秒激光在熔融石英玻璃内部形成微/纳米流体通道的情况。通过控制飞秒激光脉冲的辐照条件，特别是脉冲能量和扫描速度，来制造微/纳米流体通道。我们研究了这种通道在空气和水中的产生。在这两种情况下，激光束都聚焦在玻璃棒内部，并以非常低的扫描速度水平照射。如果是水，则将玻璃样品放在蒸馏水中，这有望减少通道的表面粗糙度。还比较了在不同环境下制造的通道的质量。我们进一步研究了各种激光参数对通道产生的影响。我们还评估了在不同的环境和辐照条件下制造的各种直径的微/纳米流体通道的流体流动能力。

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  • 来源
  • 会议地点 San Francisco CA(US)
  • 作者

    Fadia Dewanda; Md. Shamim Ahsan; Man Seop Lee;

  • 作者单位

    Photonics Application Lab, Dept. of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro (373-1 Guseong-dong), Yuseong-gu, Daejeon 305-701,South Korea;

    Photonics Application Lab, Dept. of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro (373-1 Guseong-dong), Yuseong-gu, Daejeon 305-701,South Korea Electronics and Communication Engineering Discipline, School of Science Engineering and Technology, Khulna University, Khulna-9208, Bangladesh;

    Photonics Application Lab, Dept. of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro (373-1 Guseong-dong), Yuseong-gu, Daejeon 305-701,South Korea;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Femtosecond laser; fused silica glass; microano-fluidic channels;

    机译：飞秒激光；石英玻璃微/纳米流体通道;

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