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首页> 外文会议>Microfluidics, BioMEMS, and Medical Microsystems V; Proceedings of SPIE-The International Society for Optical Engineering; vol.6465 >Fabrication and Characterization of S1O_2 Microcantilever for High Sensitive Moisture Sensor
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Fabrication and Characterization of S1O_2 Microcantilever for High Sensitive Moisture Sensor

机译：高灵敏度水分传感器S1O_2微悬臂梁的制备与表征

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摘要

This paper reports a novel design of SiO_2 microcantilever for high sensitivity sensor platform. In order to fabricate this device, a new fabrication process using isotropic combined with anisotropic dry etching to release the SiO_2 microcantilever beam by ICP (Inductively Coupled Plasma) was developed and investigated. This new process not only obtains a high etch rate at 9.1 μm per minute, but also provides a good profile controllability, and a flexibility of device design. To compare the SiO_2 and Si cantilever beam, the results of simulation and theoretical analysis are given. The results predict the SiO_2 cantilever can achieve a higher sensitivity than the Si cantilever. The SiO_2 cantilever beams with 1 urn thickness, 100 μm width, and 250 μm length were fabricated and tested by exposing it to aminoethanethiol solution of low concentration. The experimental data support the prediction derived from the simulation results. The moisture sensor based on the surface modified cantilever beam showed a good response to one percentage relative humidity.
机译：本文报道了一种用于高灵敏度传感器平台的SiO_2微悬臂梁的新颖设计。为了制造该器件，开发并研究了使用各向同性与各向异性干法刻蚀相结合以通过ICP（感应耦合等离子体）释放SiO_2微悬臂梁的新制造工艺。这一新工艺不仅获得了每分钟9.1μm的高蚀刻速率，而且还提供了良好的轮廓可控性和设备设计的灵活性。为了比较SiO_2和Si悬臂梁，给出了仿真结果和理论分析。结果表明，SiO_2悬臂比Si悬臂具有更高的灵敏度。制作厚度为1，宽度为100μm，长度为250μm的SiO_2悬臂梁，并将其暴露于低浓度的氨基乙硫醇溶液中进行测试。实验数据支持从仿真结果得出的预测。基于表面改性悬臂梁的湿度传感器对百分之一的相对湿度显示出良好的响应。

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